MN-E00372EDW-XX_B(1) - 第177页

Section 13 Part No Description Rev Page 01-E36201 (WC83) WAFER CASSETTE ELEVATOR B 13-1 01-E10990 (WC) CASSETTE PLATFORM (G2) A 13-4 01-E10991 (WC) PLATFORM BASE ASSY (G2) B 13-5 01-E10988 (WC) PLATFORM BASE (G2) D 13-6 …

Section 13

Part NoDescriptionRevPage

01-E36201(WC83) WAFER CASSETTE ELEVATORB13-1

01-E10990(WC) CASSETTE PLATFORM (G2)A13-4

01-E10991(WC) PLATFORM BASE ASSY (G2)B13-5

01-E10988(WC) PLATFORM BASE (G2)D13-6

01-E18997(WC) CASSETTE PRESENT SNR ASSY (6 INCH)A13-7

01-E19000(WC) CASSETTE PRESENT SNR MECH ASSYA13-8

01-E18998(WC) CASSETTE PRESENT SNR ASSY (8 INCH)A13-9

01-E18999(WC) CASSETTE PRESENT SNR ASSY (12 INCH)A13-10

01-E19121(WCFC) SAFETY GUARD SOL ASSYB13-11

01-E19779(WCG2) Z- TRANSPORTERC13-12

01-E28759(WC) SAFETY GUARD ASSY_G2_NUB13-13

01-E28760(WC) SAFETY GUARD ASSY_NUI13-14