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Section 13
Part NoDescriptionRevPage
01-E36201(WC83) WAFER CASSETTE ELEVATORB13-1
01-E10990(WC) CASSETTE PLATFORM (G2)A13-4
01-E10991(WC) PLATFORM BASE ASSY (G2)B13-5
01-E10988(WC) PLATFORM BASE (G2)D13-6
01-E18997(WC) CASSETTE PRESENT SNR ASSY (6 INCH)A13-7
01-E19000(WC) CASSETTE PRESENT SNR MECH ASSYA13-8
01-E18998(WC) CASSETTE PRESENT SNR ASSY (8 INCH)A13-9
01-E18999(WC) CASSETTE PRESENT SNR ASSY (12 INCH)A13-10
01-E19121(WCFC) SAFETY GUARD SOL ASSYB13-11
01-E19779(WCG2) Z- TRANSPORTERC13-12
01-E28759(WC) SAFETY GUARD ASSY_G2_NUB13-13
01-E28760(WC) SAFETY GUARD ASSY_NUI13-14
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WC83) WAFER CASSETTE ELEVATOR
01-E36201
CS-01-E36201
31
FROM: 01-E36201_B_2015.02.13
B1
B
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 01-E10990 (WC) CASSETTE PLATFORM (G2) 1
2 01-E19121 (WCFC) SAFETY GUARD SOL ASSY 1
3 01-E19779 (WCG2) Z- TRANSPORTER 1
4 01-E28759 (WC) SAFETY GUARD ASSY_G2_NU 1
1
2
3
4
Assembly View
Section 13(WC83) WAFER CASSETTE ELEVATOR
13-1