MN-E00372EDW-XX_B(1) - 第192页
CS DWG NO. OF REV DESCRIPTION SHEET DESCRIPTION NO. PART NO. PART INFORMATION AND IS NOT TO BE USED OR DO NOT SCALE REPRODUCED WITH OUT PERMISSION OF THIS DRAWING CON TAINS PROPRIETARY ALL CAPACITORS ARE IN µ F ALL RESIS…
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WC) SAFETY GUARD ASSY_G2_NU
01-E28759
CS-01-E28759
11
FROM: 01-E28759_B_2015.03.06
B1
B
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 01-E28760 (WC) SAFETY GUARD ASSY_NU 1
2 02-76540 (WC) SAFETY GUARD, ENGAGE ON SNR 1
3 02-76541 (WC) SAFETY GUARD, ENGAGE OFF SNR 1
4 26-G48536 (WC) OPEN DOOR CYLINDER STOPPER 1
5 26-G48537 (WC) OPEN DOOR CYLINDER ADAPTOR 2
Assembly View
2
3
1
4
5
13-13
(WC83) WAFER CASSETTE ELEVATOR
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WC) SAFETY GUARD ASSY_NU
01-E28760
CS-01-E28760
11
FROM: 01-E28760_I_2015.03.21
I1
I
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 02-E11663 (WC) SAFETY SENSOR ASSY_NU 1
2 23-40001 DOWEL PIN DIA3X10LG 4
3 24-30013 LM SLIDER FBW3590R-400L 2
4 26-G48536 (WC) OPEN DOOR CYLINDER STOPPER 1
5 26-G48537 (WC) OPEN DOOR CYLINDER ADAPTOR 2
6 32-00016 PNEU. CYLINDER, RODLESS, 10X200 1
7 72-71010 U-SHAPED GASKET SW90102 [54T2] 1
8 76-00020 SHOCK ABSORBER RB0604 2
9 820-10080 S BTN HD SCW M5X6 8
Assembly View
3
4
5
6
2
7
8
9
1
53-40310
NOTE:53-40310 is included of 02-E11663 in the assembly.
13-14
(WC83) WAFER CASSETTE ELEVATOR
Section 14
Part NoDescriptionRevPage
01-E66725(MO83) OUTPUT MAGAZINE ELEVATOR G2A14-1
01-E33687(MO) LEFT ELEVATOR G2 ASSYA14-3
01-E33725(MO) ELEVATOR Z AXIS ASSYC14-4
01-E33726(MO) UPF, MAG. GUIDE ASSY.C14-5
01-E33729(MO) UPPER GRIPPER ASSYA14-6
01-E66726(MO) UPPER PLATFORM ASSYA14-7
01-E20464(MO) UPF, MAG. GUIDE ASSY.C14-8
S01-E47078(MO) UPF, MAG. FULL SENSOR ASSY.A14-9
01-E66728(MO) OUTPUT MAGAZINE LOADER G2 ASSYA14-10
01-E20361(MO) CONVEYER MAG. GUIDE ASSYD14-11
01-E33740(MO) CONVEYER Y DRIVING ASSYA14-12
S01-E47122(MO) CONVEYER MAG. EXISTING SNR ASSY.A14-13
S01-E47123MO) CONVEYER MAG. READY SNR ASSY.A14-14