MN-E00372EDW-XX_B(1) - 第45页
CS DWG NO. OF REV DESCRIPTION SHEET DESCRIPTION NO. PART NO. PART INFORMATION AND IS NOT TO BE USED OR DO NOT SCALE REPRODUCED WITH OUT PERMISSION OF THIS DRAWING CON TAINS PROPRIETARY ALL CAPACITORS ARE IN µ F ALL RESIS…
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WHFC) WORKHOLDER
01-E35502
CS-01-E35502
21
FROM: 01-E35502_D_2015.06.10
D1
D
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 01-E18273 (WH)LF ADJUST ASSY 1
2 01-E18561 (WH)INDEXER 1
3 01-E18610 (WH)PNEU ASSY 1
4 01-E20024 (WH)DISP WINDOW CLAMP 1
5 01-E20025 (WH)BOND WINDOW CLAMP 1
6 01-E23739 (WH)PROCESS PLATFORM ASSY 1
7 01-E38498 (WH)FRONT TRACK MODULE 1
8 01-E44896 (WH) WINDOW CLAMP(SNR VERSION) 1
9 20-00066 SOC HD CAP SCREW M4X12 ALLOY ST ZN PLT 16
Assembly View
1
2
3
6
7
9
4
5
8
NOTE:01-E20024,01-E20025 are included of 01-E44896 in the assembly.
Section 2(WHFC) WORKHOLDER
2-1
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WHFC) WORKHOLDER
01-E35502
CS-01-E35502
22
FROM: 01-E35502_D_2015.06.10
D1
D
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
S02-50532
(WH) DOUBLE LF AMPLIFER
02-E03939
(WH)WAFER ID SNR
02-E04233
(WH)UDA HOME SNR
02-E03936
(WH)DOWN SET HOME SNR
02-E03954
(WH)INDEXER ENC
53-40163
HIGH SENSITIVITY SENSOR
02-E03953
(WH)INDEXER ENC
53-40163
53-40163
HIGH SENSITIVITY SENSOR
02-E03952
(WH)INDEXER ENC
02-E29498
(WH) INPUT AMPLIFER
02-E03934
02-E03948
(WH)ANTI JAM SNR
(WH)WT HOME SNR
02-E03951
(WH)INDEXER ENC
02-E03938
(WH)LF ON TRACK SNR
02-E05692
(WH)WC LOWER SNR
02-E05691
(WH)WC HOME SNR
02-E05690
02-E05689
(WH)WC LOWER SNR
(WH)WC HOME SNR
02-E05687
02-E05688
(WH)WC HOME SNR
(WH)WC LOWER SNR
2-2
(WHFC) WORKHOLDER