MN-E00372EDW-XX_B(1) - 第72页
CS DWG NO. OF REV DESCRIPTION SHEET DESCRIPTION NO. PART NO. PART INFORMATION AND IS NOT TO BE USED OR DO NOT SCALE REPRODUCED WITH OUT PERMISSION OF THIS DRAWING CON TAINS PROPRIETARY ALL CAPACITORS ARE IN µ F ALL RESIS…
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WH) KIKCER HEAD W JAM SNR
S01-E44224
CS-S01-E44224
11
FROM: S01-E44224_B_2015.06.19
B1
B
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 20-60425 SOC HD CAP SCREW M1.6X5 2
2 20-70431 SOC SET CUP SCREW M2 X 2.5 1
3 20-70472 SOC SET CUP SCREW M3 X 6 1
4 20-71470 NYLON TIPPED SOC SET SCREW M3X4 1
5 24-11016 BALL BEARING 2X5X2.3 NMBL-520ZZ 2
6 75-10043 COMPRESSION SPRING D20680 1
7 S02-47234 (OP) KICKER HEAD JAM SNR ASSY 1
8 S26-G74003 (WH) SPACER 1
9 S26-G78202 (WH) KICKER HEAD SPRING CAP 1
10 S26-G88156 (OP) KICKER HEAD SHAFT 1
Assembly View
1
2
3
4
5
6
7
8
9
10
2-27
(WHFC) WORKHOLDER
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WH)DOUBLE LF SNR
01-E18554
CS-01-E18554
11
FROM: 01-E18554_B_2015.03.09
B1
B
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 23-40043 DOWEL PIN D3 X L10, SST 1
2 53-00266 OPTICAL FIBER HPF-S080-B 1
Assembly View
1
2
2-28
(WHFC) WORKHOLDER
CS DWG NO.
OF
REV
DESCRIPTION
SHEET
DESCRIPTION
NO.
PART
NO.
PART
INFORMATION AND IS NOT TO BE USED OR
DO NOT SCALE
REPRODUCED WITHOUT PERMISSION OF
THIS DRAWING CONTAINS PROPRIETARY
ALL CAPACITORS ARE IN µ F
ALL RESISTORS ARE IN Ω
ALL DIM ARE IN mm
UNLESS OTHERWISE SPECIFIED
A S M
DWG REV
(WH)PNEU ASSY
01-E18610
CS-01-E18610
11
FROM: 01-E18610_H_2015.03.04
H1
H
ASM Pacific Technology
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING ASM CUSTOMER SERVICE DRAWINGASM CUSTOMER SERVICE DRAWING
21 3 4 5 6 7 8
8765431 2
B
A
C
D
E
F F
E
D
C
A
B
ITEM PART NO. DESCRIPTION QTY.
1 01-E19080 (PSFC) MAIN AIR SUPPLY ON/OFF SWITCH 1
2 02-E03926 (WH)OUTPUT KICKER SOL 1
3 02-E03930 (WH)ALIGN CLAMP SOL 1
4 02-E03931 (WH)AUX DISP AB VAC SOL 1
5 02-E03932 (WH)DISP AB VAC SOL 1
6 02-E03933 (WH)BOND AB VAC SOL 1
7 02-E03938 (WH)LF ON TRACK SNR ASSY 1
8 02-E03939 (WH)WAFER ID SNR AMP 1
9 02-E05010 (PSFC) PRESSURE SNR PANEL 1 1
10 02-E05011 (PSFC) PRESSURE SNR PANEL 2 1
11 02-E17579 (FX) BIN SOL 1
12 31-40498 4 WAY CONNECTOR KQUD06-08 1
13 33-40045 VACUUM EJECTOR ZH10DS-01-01-01 3
14 33-40158 VACUUM FILTER UNION VFU2-66 3
15 S02-50532 (WH) DOUBLE LF AMPLIFER 1
Assembly View
12
13
14
1
2
3
4
5
6
7
8
9
10
11
NOTE:01-E19080 is included of 01-E16641in the assembly.
02-E03939 is included of 01-E18604 in the assembly.
02-E03938 is included of 01-E18605 in the assembly.
S02-50532 is included of S04-E00735 in the assembly.
02-E17579 is included of 01-E35878 in the assembly.
02-E05010,02-E05011 are included of 01-E19081 in the assembly.
15
2-29
(WHFC) WORKHOLDER