TR7600 SIII_Hardware_en_v_2_0_4 - 第47页
Test Research, Inc. TR7600 SIII Series User Gu ide – Hardwa re 37
Test Research, Inc.
36 TR7600 SIII Series User Guide – Hardware
Test Research, Inc.
TR7600 SIII Series User Guide – Hardware 37
Test Research, Inc.
38 TR7600 SIII Series User Guide – Hardware
Table 3: Error Codes Of Movement along X and U Axes