M6ex_ServiceManual_j.pdf - 第8页

4 電気部 4-1 DI/DO ......................................................................................................................... .................................... 4-2 DI モニタ...................................…

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目次
1 据付 1-1
マウンタの据付 ........................................................................................................................................... 1-2
設置条件 .......................................................................................................................................................... 1-2
マシンの吊り下げ方法 ................................................................................................................................ 1-3
生産ライン出し ............................................................................................................................................... 1-5
据付.................................................................................................................................................................... 1-6
据付補足説明............................................................................................................................................... 1-10
防錆用グリスの除去 ...............................................................................................................................1-12
マウンタとローダの連結.........................................................................................................................1-14
マウンタの前後工程................................................................................................................................1-15
前後工程の接続..........................................................................................................................................1-15
搬入シーケンス(標準仕様)....................................................................................................................1-16
搬出シーケンス(標準仕様)....................................................................................................................1-17
搬入シーケンス(SMEMA 規格対応仕様) .........................................................................................1-18
搬出シーケンス(SMEMA 規格対応仕様) .........................................................................................1-19
2 点検 2-1
毎日の点検 .................................................................................................................................................. 2-2
目視点検 .......................................................................................................................................................... 2-2
手動動作による点検.................................................................................................................................... 2-4
月ごとの点検 ............................................................................................................................................... 2-5
3 機械部 3-1
ヘッドマニホールド部 ................................................................................................................................ 3-3
ヘッド詰り/ノズル詰りと、ソレノイドバルブ故障の確認 ................................................................ 3-4
ノズル.............................................................................................................................................................. 3-6
ノズルホルダ................................................................................................................................................... 3-9
O リング...........................................................................................................................................................3-11
ノズルフィルタ ...............................................................................................................................................3-11
ID シール .....................................................................................................................................................3-15
ノズル ID シールの貼り方 ........................................................................................................................3-15
シールの清掃 ............................................................................................................................................... 3-16
フランジシール...........................................................................................................................................3-17
カメラ.............................................................................................................................................................3-18
カメラのミラーとレンズについて .............................................................................................................3-18
スキャンカメラの清掃.................................................................................................................................3-18
固定カメラの清掃 ........................................................................................................................................3-19
ティーチカメラの清掃 ................................................................................................................................. 3-19
レンズフィルタの清掃.................................................................................................................................3-19
注油...............................................................................................................................................................3-20
注油箇所 ........................................................................................................................................................3-20
指定潤滑油 ...................................................................................................................................................3-30
4 電気部 4-1
DI/DO............................................................................................................................................................. 4-2
DI モニタ............................................................................................................................................................ 4-2
DO 操作 ............................................................................................................................................................ 4-5
シリアル I/O .................................................................................................................................................... 4-7
DO マップ.......................................................................................................................................................... 4-8
DI マップ..........................................................................................................................................................4-14
System Box Assy.....................................................................................................................................4-19
制御基板 .....................................................................................................................................................4-21
制御基板の取扱い ..................................................................................................................................... 4-21
フロッピーディスクとディスクドライブ(オプション).........................................................................4-22
フロッピーディスクの取扱い ....................................................................................................................4-22
フロッピーディスクドライブのクリーニング..........................................................................................4-22
フィーダ/フィーダバンクの電極部....................................................................................................4-23
基板検出センサ........................................................................................................................................4-24
電気部全般に関する注.....................................................................................................................4-26
5 資料 5-1
付属品リスト................................................................................................................................................. 5-2
消耗品リスト................................................................................................................................................. 5-4
1.据付
1-1
1 据付