5OM-1075-002.pdf - 第40页
Section 3 Location of Sensors and Loads 0107-001-(M750JF---2102) 3-5 AHB01EMTP Layout of Sensors and Loads (Nozzle Stocker (B2))
Section 3 Location of Sensors and Loads
0308-002 -(M750JF---2101) 3-4 AHB01EMTP
Layout of Sensors and Loads (Nozzle Stocker (B1))
Lifted Nozzle Detection B1
Nozzle Stocker B1 Closing Check
Nozzle Stocker B1 Opening Check
Nozzle Stocker B1 Open
Nozzle Stocker B1 Closed
Symbol Name
-BPH061
-BPH062
-BPH063
-YSV12A
-YSV12B
Note
Section 3 Location of Sensors and Loads
0107-001-(M750JF---2102) 3-5 AHB01EMTP
Layout of Sensors and Loads (Nozzle Stocker (B2))
Section 3 Location of Sensors and Loads
0308-003 B(M750JG---2102) 3-6 AHB01EMTP
Layout of Sensors and Loads (Cover Section)
Maintenance Opening Detection A
Maintenance Opening Detection B
Symbol Name
BPH082AT (Light Projecting)
BPH082AR (Light Receiving)
BPH082BT (Light Projecting)
BPH082BR (Light Receiving)
YSOL01 (SQ1)
YSOL02 (SQ2)
YSOL03 (SQ3)
YSOL04 (SQ4)
YSOL05 (SQ5)
Note
Safety Door Electromagnetic Lock A
Safety Door Electromagnetic Lock B
Feeder Base #1 Pullout Prevention Bar
Electromagnetic Lock
Feeder Base #3 Pullout Prevention Bar
Electromagnetic Lock
Feeder Base #4 Pullout Prevention Bar
Electromagnetic Lock
(Light Projecting)
(Light Projecting)
(Light Receiving)
(Light Receiving)