EN 3.pdf - 第5页
Model DECAN Series Company SAMSUNG TECHWIN Module 3.1 ANC V ersion 01 Tit le ANC T OP FLA TNESS CRITERIA Page 3-1-3 Note [ANC TOP FLA TNESS CRITERIA] ANC top's flatness criteria: 0.05mm or less. Attach a Magneti…
Model
DECAN Series
Company
SAMSUNG TECHWIN
Module
3.1 ANC
Version
01
Title
ANC SIDE FLATNESS CRITERIA
Page
3-1-2
Note
[ANC SIDE FLATNESS CRITERIA]
ANC side's flatness criteria: 0.02mm or less.
Attach a Magnetic indicator(minimum scale of 2 um) to the head and check the degree of flatness.
Using the head's fiducial camera, check the degree of flatness while watching the ANC Fiducial mark and
the Vision screen.
Model
DECAN Series
Company
SAMSUNG TECHWIN
Module
3.1 ANC
Version
01
Title
ANC TOP FLATNESS CRITERIA
Page
3-1-3
Note
[ANC TOP FLATNESS CRITERIA]
ANC top's flatness criteria: 0.05mm or less.
Attach a Magnetic indicator(minimum scale of 2 um) to the head and check the degree of flatness.
Model
DECAN Series
Company
SAMSUNG TECHWIN
Module
3.1 ANC
Version
01
Title
SHUTTER CYLINDER REPLACEM ENT
Page
3-1-4
Note
[SHUTTER CYLINDER REPLACEMENT]
1. Power off the equipment.
2. Block the air pressure supplied to the equipment.
3. Separate the air pressure tube and the cable connected to the ANC's Cylinder.
4. Release the fixing bolts for the cylinder and separate the cylinder.
5. Replace with a new cylinder.