YSH20_mpl_je.pdf - 第62页
KJX-101 1 Rev . :It had a change without the compatibility . Please be careful at the time of the parts ordering. Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. P…
KJX-1011
9
12
2
7
5
3
3
8
11
6
14
4
1
10
13
11
5
Stopper
Wafer LZ-axis
KJX-1011
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJY-M170T-00 PLATE,LIMIT
1 /
Í
39
2
KJY-M1705-00 PLATE,STOPPER
1
/
Í
40
3
KJY-M1707-00 STOPPER,SYLINDER
2 /
Í
41
4
KJY-M9165-A0 CYLINDER ASSY
1 B
Í
42
5
$SC4-M5A SPEED CONTROLLER
2 /
43
6
$NK-3N NYLON CLIP
5 /
44
7
91312-03025 BOLT,HEX.SOCKET HEAD
4
M3X25
45
8
91312-04006 BOLT HEX.SOCKET HEAD
6
M4X6
46
9
91312-04008 BOLT HEX.SOCKET HEAD
2
M4X8
47
10
91312-05012
BOLT HEX.SOCKET HEAD
2
M5X12
48
11
92902-03200 WASHER PLAIN
4 49
12
92902-04200 WASHER PLAIN
4 50
13
92902-05200 WASHER PLAIN
2 51
14
90990-11J001 SCREW PAN HEAD W/W
5 52
15 53
16 54
17 55
18
56
19
57
20
58
21 59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
11
5
Stopper
Wafer LZ-axis
KJX-1107
7
33
3
19
2
31
34
18
8
4
22
23
27
27
31
1
20
29
6
29
15
29
26
10
13
24
25
25
25
25
25
25
25
25
14
11
11
15
11
5
29
33
12
16
17
9
21
30
32
32
12
1
LCY-axis
Wafer Head LCY-axis