YSH20_mpl_je.pdf - 第63页
KJX-1 107 7 33 3 19 2 31 34 18 8 4 22 23 27 27 31 1 20 29 6 29 15 29 26 10 13 24 25 25 25 25 25 25 25 25 14 1 1 1 1 15 1 1 5 29 33 12 16 17 9 21 30 32 32 12 1 LCY-axis Wafer Head LCY-axis
KJX-1011
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJY-M170T-00 PLATE,LIMIT
1 /
Í
39
2
KJY-M1705-00 PLATE,STOPPER
1
/
Í
40
3
KJY-M1707-00 STOPPER,SYLINDER
2 /
Í
41
4
KJY-M9165-A0 CYLINDER ASSY
1 B
Í
42
5
$SC4-M5A SPEED CONTROLLER
2 /
43
6
$NK-3N NYLON CLIP
5 /
44
7
91312-03025 BOLT,HEX.SOCKET HEAD
4
M3X25
45
8
91312-04006 BOLT HEX.SOCKET HEAD
6
M4X6
46
9
91312-04008 BOLT HEX.SOCKET HEAD
2
M4X8
47
10
91312-05012
BOLT HEX.SOCKET HEAD
2
M5X12
48
11
92902-03200 WASHER PLAIN
4 49
12
92902-04200 WASHER PLAIN
4 50
13
92902-05200 WASHER PLAIN
2 51
14
90990-11J001 SCREW PAN HEAD W/W
5 52
15 53
16 54
17 55
18
56
19
57
20
58
21 59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
11
5
Stopper
Wafer LZ-axis
KJX-1107
7
33
3
19
2
31
34
18
8
4
22
23
27
27
31
1
20
29
6
29
15
29
26
10
13
24
25
25
25
25
25
25
25
25
14
11
11
15
11
5
29
33
12
16
17
9
21
30
32
32
12
1
LCY-axis
Wafer Head LCY-axis
KJX-1107
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJY-M2621-01 BRACKET,SENSOR
1 /
Í
39
2
KJY-M2622-01 BRACKET,DOG
1
/
Í
40
3
KHN-M220F-06 CAMERA SELECTOR
1 B
Í
41
4
KJY-M2632-00 BRKT. VALVE
1 /
Í
42
5
KJY-M2638-00 BRKT. C/R
1 /
Í
43
6
KJY-M2639-00 COVER C/R BOX
1 /
Í
44
7
KJY-M263A-00 BRKT. CAM SELECTOR
1
/
Í
45
8
KJY-M2650-00 VALVE
1
B
Í
46
9
KJY-M652F-00 SENSOR LCY ORG ASSY
1
B
Í
47
10
KJX-M7190-40 HEAD C/R BOX ASSY.
1 B
Í
48
11
KHY-M5890-40 HEAD SERVO BRD. ASSY
3 B
Í
49
12
KJX-M457R-01 HEAD I/O1 BOARD ASSY
1 B
Í
50
13
KJX-M457U-01 HEAD I/O2 BOARD ASSY
1 B
Í
51
14
KJX-M457W-01 HEAD I/O3 BOARD ASSY
1 B
Í
52
15
KJX-M7192-00 HEAD I/O BOX
1 /
Í
53
16
KJX-M7192-30 POST3
1 /
Í
54
17
KJX-M7192-40 POST4
1 /
Í
55
18
K40-M8598-00 PLUG 1
2
/
Í
56
19
90K63-911362 AC SERVO MOTOR
1
B
Í
57
20
90K63-911363 AC SERVO MOTOR
1 B
Í
58
21
$SL4-M5 JOINT
4 /
59
22
$TS10-01 JOINT
1 /
Í
60
23
$TS8-01 JOINT
1 /
61
24
90563-03J160 SPACER BOLT
4 62
25
97602-03306 SCREW,PAN HEAD W/W
20 63
26
98702-03004 SCREW FLAT HEAD
8 64
27
98502-03005 SCREW PAN HEAD
2 65
28
91312-03014 BOLT,HEX.SOCKET HEAD
4
M3X14
66
29
91312-04005 BOLT HEX.SOCKET HEAD
16
M4X5
67
30
91312-04006 BOLT HEX.SOCKET HEAD
19
M4X6
68
31
91312-04010 BOLT HEX.SOCKET HEAD
4
M4X10
69
32
91312-04014 BOLT HEX.SOCKET HEAD
26
M4X14
70
33
91312-05010 BOLT HEX.SOCKET HEAD
8
M5X10
71
34
92902-04200 WASHER PLAIN
2 72
35 73
36 74
37 75
38 76
12
1
LCY-axis
Moving-axis