YSH20_mpl_je.pdf - 第64页
KJX-1 107 Rev . :It had a change without the compatibility . Please be careful at the time of the parts ordering. Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. P…
KJX-1107
7
33
3
19
2
31
34
18
8
4
22
23
27
27
31
1
20
29
6
29
15
29
26
10
13
24
25
25
25
25
25
25
25
25
14
11
11
15
11
5
29
33
12
16
17
9
21
30
32
32
12
1
LCY-axis
Wafer Head LCY-axis
KJX-1107
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJY-M2621-01 BRACKET,SENSOR
1 /
Í
39
2
KJY-M2622-01 BRACKET,DOG
1
/
Í
40
3
KHN-M220F-06 CAMERA SELECTOR
1 B
Í
41
4
KJY-M2632-00 BRKT. VALVE
1 /
Í
42
5
KJY-M2638-00 BRKT. C/R
1 /
Í
43
6
KJY-M2639-00 COVER C/R BOX
1 /
Í
44
7
KJY-M263A-00 BRKT. CAM SELECTOR
1
/
Í
45
8
KJY-M2650-00 VALVE
1
B
Í
46
9
KJY-M652F-00 SENSOR LCY ORG ASSY
1
B
Í
47
10
KJX-M7190-40 HEAD C/R BOX ASSY.
1 B
Í
48
11
KHY-M5890-40 HEAD SERVO BRD. ASSY
3 B
Í
49
12
KJX-M457R-01 HEAD I/O1 BOARD ASSY
1 B
Í
50
13
KJX-M457U-01 HEAD I/O2 BOARD ASSY
1 B
Í
51
14
KJX-M457W-01 HEAD I/O3 BOARD ASSY
1 B
Í
52
15
KJX-M7192-00 HEAD I/O BOX
1 /
Í
53
16
KJX-M7192-30 POST3
1 /
Í
54
17
KJX-M7192-40 POST4
1 /
Í
55
18
K40-M8598-00 PLUG 1
2
/
Í
56
19
90K63-911362 AC SERVO MOTOR
1
B
Í
57
20
90K63-911363 AC SERVO MOTOR
1 B
Í
58
21
$SL4-M5 JOINT
4 /
59
22
$TS10-01 JOINT
1 /
Í
60
23
$TS8-01 JOINT
1 /
61
24
90563-03J160 SPACER BOLT
4 62
25
97602-03306 SCREW,PAN HEAD W/W
20 63
26
98702-03004 SCREW FLAT HEAD
8 64
27
98502-03005 SCREW PAN HEAD
2 65
28
91312-03014 BOLT,HEX.SOCKET HEAD
4
M3X14
66
29
91312-04005 BOLT HEX.SOCKET HEAD
16
M4X5
67
30
91312-04006 BOLT HEX.SOCKET HEAD
19
M4X6
68
31
91312-04010 BOLT HEX.SOCKET HEAD
4
M4X10
69
32
91312-04014 BOLT HEX.SOCKET HEAD
26
M4X14
70
33
91312-05010 BOLT HEX.SOCKET HEAD
8
M5X10
71
34
92902-04200 WASHER PLAIN
2 72
35 73
36 74
37 75
38 76
12
1
LCY-axis
Moving-axis
KJX-1011
2
3
4
6
8
10
12
16
19 21
23
25
1.7
12U1
D
1.7
D
2.7
D
2.7
D
2.7
D
2.7
D
1.7
D
1.7
D
1.7
D
1.7
D
1.7
D
12U1 12U1
12U1
12U1 12U1 12U1
12C 12C 12C 12C
1 5 7 9 11 13
15 17 20 22 24
NOZZLE 07 ASSY NOZZLE 10 ASSY NOZZLE 12 ASSY NOZZLE 15 ASSY NOZZLE 20 ASSY NOZZLE 38 ASSY
NOZZLE 50 ASSY NOZZLE 71 ASSY NOZZLE 86 ASSY NOZZLE 112 ASSY NOZZLE 120 ASSY
14
2
4
2
4
2
4
2
4
2
4
2
4
18
4
18
4
18
4
18
4
13
1
Nozzle Selection
Wafer Head