YSH20_mpl_je.pdf - 第68页
KJX-101 1 Rev . :It had a change without the compatibility . Please be careful at the time of the parts ordering. Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. P…
KJX-1011
16
1
4
3
23
24
2
21
21
9
14
19
11
12
10
13
13
17
22
20
8
7
6
16
15
5
23
24
15
18
14
1
Cable / Valve
Wafer Ejector
KJX-1011
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJY-M97A5-00 CABLE ASSY
1 /
Í
39
2
KJY-M9780-00 BASE,CABLE
1
/
Í
40
3
KJY-M9781-00 BRACKET,CABLE 1
1 /
Í
41
4
KJY-M9782-00 BRACKET,CABLE 2
1 /
Í
42
5
KJY-M9783-00 COVER,CABLE 1
1 /
Í
43
6
KJY-M9784-00 COVER,CABLE 2
1 /
Í
44
7
KJY-M9785-00 COVER
1
/
Í
45
8
KJY-M9786-00 BRACKET,PANEL
1
/
Í
46
9
KJY-M9790-00 BRACKET,VALVE
1
/
47
10
KJY-M9791-00 VALVE ASSY
1 B
48
11
KJY-M9792-00 VALVE ASSY
1 B
49
12
$KM-11 MUFFLER
2 /
50
13
$SL6-01 JOINT
2 /
51
14
$SL10-02 JOINT
1 /
52
15
91312-03004 BOLT HEX.SOCKET HEAD
6
M3X4
53
16
91312-03008 BOLT HEX.SOCKET HEAD
10
M3X8
54
17
92012-03006 BOLT,BUTTON HEAD
5
M3X6
55
18
91312-03025 BOLT,BUTTON HEAD
5
M3X25
56
19
91312-04035 BOLT HEX.SOCKET HEAD
4
M4X35
57
20
91312-05006 BOLT HEX.SOCKET HEAD
10
M5X6
58
21
91312-05010 BOLT HEX.SOCKET HEAD
8
M5X10
59
22
92012-04006 BOLT, BUTTON HEAD
2 60
23
90990-11J003 SCREW,PAN HEAD W/W
6 61
24
$NK-3N NYLON CLIP
6 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
14
1
Cable / Valve
Wafer Ejector
KJX-1107
1 4 4
7
13 19
2
3
5
6
5
6
8
9
10
11
12
14
15
16
17
20
18
14
2
Ejector Housing / Pin
Wafer Ejector