YSH20_mpl_je.pdf - 第7页
KJX-1 107 1 25 23 24 22 30 32 28 31 29 27 26 1 1 12 1 1 14 3 1 1 5 13 7 6 8 16 15 17 19 18 21 20 8 2 9 10 1 1 4 33 34 35 1 1 Sub Assy Base
14. Wafer Ejector Section
15. Wafer Table-axis Section
16. Wafer Attachment Section
17. Wafer Pallet Section
14-1. Cable / Valve 14-2. Ejector Housing / Pin 15-1. Sensor / Motor / Stay 16-1. Attachment Assy
17-1. Pallet Assy (8/6inch/Rack)
18. Tools Section
18-1. Tools
Contents
1 2 3 4 5
6 7 8 9 10
11 12 13 14 15
16 17 18 19
KV8-M8860-00 KV8-M8883-A0 KV7-M8880-20 KGA-M3801-00 KGA-M3803-00
KV8-M8881-A0 KU4-M8590-00 KV8-M8870-00
K48-M3852-01 K48-M3857-00 K48-M3854-00 KM8-M34E0-B1 KJ3-MY010-00
KJ3-M34E0-XX KV7-M3823-00 KV7-M8890-00KJ3-MJA00-00
KVA-M3802-00
3 / 3
KJX-1107
1
25
23
24
22
30
32
28
31
29
27
26
11
12
11
14
3
11
5
13
7
6
8
16
15
17
19
18
21
20
8
2
9
10
11
4
33
34
35
1
1
Sub Assy
Base
KJX-1107
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJX-M91T0-00 TERMINAL BOARD ASSY
2 B
Í
39
2
KJX-M112C-00
BRACKET,AIR UNIT
1 /
Í
40
3
KH1-M8501-00 EXHAUST VALVE
1 /
Í
41
4
KHY-M8504-00 REGULATOR
1 /
Í
42
5
KHY-M8596-00 PRESSURE GAUGE
1 B
43
6
KJX-M8502-A0 VACUUM GAUGE ASSY.1
1 B
44
7
KJX-M8502-B0 VACUUM GAUGE ASSY.2
1
B
45
8
KHW-M8597-00 BRACKET,GAUGE
3
/
46
9
$KM-23 MUFFLER
1
/
Í
47
10
$KM-31 MUFFLER
1 /
Í
48
11
$SL12-03 JOINT
4 /
Í
49
12
$TBLY4-02 JOINT
1 /
Í
50
13
$SL4-M5 JOINT
3 /
51
14
91312-04010 BOLT HEX.SOCKET HEAD
4 52
15
KJX-M110G-01 FILTER SET
1 /
53
16
KJX-M11C0-00 AIR TAG
1 /
54
17
$SL12-03 JOINT
1 /
55
18
90990-42J008 JOINT
1
/
56
19
90990-42J006 JOINT
1
/
57
20
91312-06014 BOLT HEX.SOCKET HEAD
2
/
58
21
92902-06200 WASHER PLAIN
2 /
59
22
KJJ-M911Y-00 PLATE,TERMINAL
1 /
Í
60
23
KKE-M111G-00 COVER,TERMINAL
1 /
61
24
90563-03J450 SPACER BOLT
4 /
62
25
91312-03005 BOLT HEX.SOCKET HEAD
4
M3X5
/
63
26
90990-12J004 SCREW BIN.HEAD W/W
4 64
27
KJX-M010D-00 VALVE ASSY
1 B
Í
65
28
KJX-M111H-00 BRACKET,VALVE
1 /
66
29
KHW-M8582-40 VALVE
1
Spare
B
67
30
$KM-11 MUFFLER
1
Spare
/
68
31
$TL8-01 JOINT
1 /
69
32
90990-12J004 SCREW BIN.HEAD W/W
4 70
33
91312-03025 BOLT,HEX.SOCKET HEAD
4
M3X25
71
34
KG2-M669R-11 HNS. BUZZER
1 /
Í
72
35
KJJ-M4554-00 TERMINAL BOARD ASSY
2 B
Í
73
36 74
37 75
38 76
1
1
Sub Assy
Base