YSH20_mpl_je.pdf - 第75页

KJX-1 107 2 3 4 4 3 4 1 9 33 33 33 32 32 5 6 7 8 10 18 18 23 1 1 23 25 25 25 25 25 20 25 31 31 24 29 13 13 13 13 12 12 34 34 15 26 26 25 30 30 27 27 27 17 14 27 8 inch 6 inch 19 16 33 33 33 32 32 4 21 31 35 28 36 37 28 1…

100%1 / 79
KJX-1011
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJY-M3B1C-A0 CLAMP,HNS
38 /
Í
39
2
KJY-M3B1E-A0
RAIL L,ATTACH12
1
/
Í
40
3
KJY-M3B1F-A0 RAIL R,ATTACH12
1 /
Í
41
4
KJY-M652M-00 SENSOR PLT STG ASSY
3 B
Í
42
5
KJY-M923G-00 BRACKET,AMP
3 /
Í
43
6
KJY-M3B1J-A0 GUIDE R,12
6 /
Í
44
7
KJY-M3B1L-A0 GUIDE FR,12
1 /
Í
45
8
KJY-M3B1K-A0 GUIDE FL,12
1 /
Í
46
9
KJY-M3B21-A0 RING 12
1 /
47
10
KJY-M3B1E-B0 RAIL L,ATTACH8
1 /
Í
48
11
KJY-M3B1F-B0 RAIL R,ATTACH8
1 /
Í
49
12
KJY-M3B1K-B0 GUIDE FL,8
1 /
Í
50
13
KJY-M3B1L-B0 GUIDE FR,8
1 /
Í
51
14
KJY-M3B22-B0 RING 8,ADAPTER
1 /
52
15
KJY-M3B21-B0 RING 8
1 /
53
16
KJY-M3B23-B0 DOG 8,SENSOR
1 /
Í
54
17
KJY-M3B1F-C0 RAIL R,ATT6
1 /
Í
55
18
KJY-M3B1E-C0 RAIL L,ATT6
1 /
Í
56
19
KJY-M3B1K-C0 GUIDE FL,6
1 /
Í
57
20
KJY-M3B1L-C0 GUIDE FR,6
1
/
Í
58
21
KJY-M3B21-C0
RING 6
1 /
59
22
KJY-M3B22-C0 RING 6,ADAPTER
1 /
60
23
KJY-M3B00-A0 ATTACHMENT.12IN
1 /
61
24
KJY-M3B00-B0 ATTACHMENT.8IN
1 /
62
25
KJY-M3B00-C0 ATTACHMENT.6IN
6 /
63
26
91312-03012 BOLT,HEX.SOCKET HEAD
20
M3X12
64
27
91312-03004 BOLT HEX.SOCKET HEAD
6
M3X4
65
28
98502-03003 SCREW,PAN HEAD
38 66
29
98702-03008 SCREW FLAT HEAD
57 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
16
1
Attachment Assy
Wafer Attachment
KJX-1107
2
3
4
4
3
4
1
9
33
33
33
32
32
5
6
7
8
10
18
18
23
11
23
25
25
25
25
25
20
25
31
31
24
29
13
13
13
13
12
12
34
34
15
26
26
25
30
30
27
27
27
17
14
27
8 inch 6 inch
19
16
33
33
33
32
32
4
21
31
35
28
36
37
28
17
1
Pallet Assy (8/6inch/Rack)
Wafer Pallet
KJX-1107
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJY-M1781-00 PLATE,BOTTOM 8
1 /
39
2
KJY-M1782-00 RING 8,TRAY
1
/
40
3
KJY-M1786-00 PIN
8 /
41
4
KJY-M1787-00 LOCATE PIN,TRAY
4 /
42
5
KJY-M178A-00 CLAMP A,8 INCH ASSY
4
8 inch
/
43
6
KJY-M178A-10 CLAMP A,6 INCH ASSY
4
6 inch
/
44
7
KJY-M178B-00 CLAMP B,8 INCH ASSY
4
8 inch
/
45
8
KJY-M178B-10 CLAMP B,6 INCH ASSY
4
6 inch
/
46
9
KJY-M1781-10 PLATE,BOTTOM 6
1
/
47
10
KJY-M1782-10 RING 6,TRAY
1 /
48
11
KJY-M1741-L0 SIDE PLATE,L
1 /
Í
49
12
KJY-M1744-00 CARD GUIDE
2 /
Í
50
13
KJY-M1742-00 PLATE,BASE
5 /
Í
51
14
KJY-M1741-R0 SIDE PLATE,R
1 /
Í
52
15
KJY-M1743-00 COVER
1 /
Í
53
16
KJY-M174B-L0 BLOCK,L1
1 /
Í
54
17
KJY-M174B-R0 BLOCK,R1
1 /
Í
55
18
KJY-M1748-00 SPRING
2
/
Í
56
19
KJY-M174C-L0 BLOCK,L2
1
/
Í
57
20
KJY-M174C-R0 BLOCK,R2
1 /
Í
58
21
KJY-M1745-01 REAR COVER
1 /
Í
59
22 60
23
KJY-M1747-00 STOPPER,GUIDE
2 /
Í
61
24
KJY-M174D-00 DOG,SENSOR
1 /
Í
62
25
91312-03008 BOLT HEX.SOCKET HEAD
22
M3X8
63
26
91312-03012 BOLT,HEX.SOCKET HEAD
12
M3X12
64
27
91312-03010 BOLT HEX.SOCKET HEAD
12
M3X10
65
28
91312-03005 BOLT HEX.SOCKET HEAD
6
M3X5
66
29 67
30
92903-03600 WASHER,PLAIN
12 68
31
90990-01J039 BOLT,HEX.SOCKET HEAD
14 69
32
98702-03008 SCREW FLAT HEAD
6 70
33
90990-09J004 SCREW,FLAT HEAD
28 71
34
98702-03008 SCREW FLAT HEAD
16 72
35
KJY-M17B0-01 RACK ASSY
1 /
73
36
KJY-M174E-00 STOPPER
2 74
37
KJY-M174F-00 SHEET, STOPPER
2 75
38 76
17
1
Pallet Assy (8/6inch/Rack)
Wafer Pallet