2OM-1088-002.pdf - 第313页
Tg0699-PM-D2 0207-001 Chapter 2 2-108
Tg0699-PM-D2
2.3 Error IDs and Remedial Procedures
0207-001 Chapter 2 2-107
Table 4B105
Error ID Item Description
2203000 Vacuum Pump Vacuum plate side change timeover
(Cause 1) The suction changeover cylinder might be malfunctioning or the cylinder
sensor might be defective.
(Remedy 1) Shut down the power of the machine once and power up the machine
again. After that, restart the operation.
When the same error still occurs, contact our service personnel for de-
tails.
Tg0699-PM-D2
0207-001 Chapter 2 2-108
Tg0699-PM-D2
Chapter 3
This chapter describes periodic maintenance operations, etc.
for those who are in charge of the machine maintenance.
Coverage: This chapter covers the periodic maintenance
operations, the list of consumables and the elec-
trical circuit diagrams, etc.
Maintenance
0207-001 Chapter 3 1