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Tg0699-PM-D2 Layout 2 of T able 0207-001-(M782YB---0002) Chapter 3 3-10 Layout 2 of T able Table X-Axis Pulse Motor Rotational Origin

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Tg0699-PM-D2
Layout 1 of Table Z-Axis
0207-001-(M782YB---0001) Chapter 3 3-9
Layout 1 of Table Z-Axis
[Table X-Axis]
+ L S
- L S
Origin
+ L S
- L S
Origin
[Table θ-Axis]
Table θ-Axis Pulse Motor
- L S
+ L S
Origin
[Table Z-Axis]
Interlock
Table Z-Axis
Servo Motor
Rotational Origin
Correction Position
Tg0699-PM-D2
Layout 2 of Table
0207-001-(M782YB---0002) Chapter 3 3-10
Layout 2 of Table
Table X-Axis
Pulse Motor
Rotational Origin
Tg0699-PM-D2
Layout of Driver 1 Section
Layout of Driver 1 Section
0207-001-(M782YBE--0001) Chapter 3 3-11