RX-6_RX-6B_RX-6R-Rev08 - 第138页
- - 67 . SYST EM DIAG RA M(HE AD IF B LOC K) V A C U U M U N I T V A C U U M U N I T F I B E R F I B E R F I B E R Z 2 S E N S O R Z 3 S E N S O R Z 4 S E N S O R Z 5 S E N S O R Z 6 S E N S O R Z 1 S E N S O R Z 2 S E…
- -
REF.NO NOTE PART NO D E S C R I P T I O N Qty
1
#01
401-29304 100VN FG WIRE ASM(EN) 1
2 401-29262 AC INPUT SURGE PROTECTOR ASM 1
3 401-29301 BREAKER-NF WIRE ASM 1
4
#04
HN-0035900-00 NOISE FILTER 1
5
#05
HN-0040100-00 NOISE FILTER 1
6 HA-0065500-00 SWITCH 1
7 401-28954 NF-FG WIRE ASM 1
8
#04
401-29303 SW-TF/MTS WIRE ASM 1
9
#05
401-58154 SW-TF/MTS WIRE ASM2 1
10 401-28955 TF-FG WIRE ASM 1
11
#04
401-28956 TF200-EU BTM WIRE ASM 1
12
#05
401-58140 TF200-EU BTM WIRE ASM2 1
13 401-28958 TF100-EU BTM WIRE ASM 1
14 401-27536 PSU_UNIT_A(ST) 1
15
#01
401-27558 PSU_UNIT_A(EN) 1
16 401-28960 EU TOP-TB1/2 WIRE ASM 1
17 401-28961 EU TOP-TB3 WIRE ASM 1
18 401-29245 VACUUM PUMP RELAY WIRE ASM 1
19 401-28959 TF100-EU TOP WIRE ASM 1
20 401-27537 PSU_UNIT_B(ST) 1
21
#01
401-27563 PSU_UNIT_B(EN) 1
22 401-28964 EU TOP-ATX RELAY WIRE ASM 1
23 401-29244 VACUUM PUMP ASM 1
24 401-28965 ATX RELAY-ATX CABLE ASM 1
25
#04
400-48007 BATTERY UNIT 1
26
#05
EZ-1756647-11 BATTERY PACK (BS06A-H24/2.5L) 1
27 401-28967 ATX-SW CABLE ASM 1
28
#04
401-28966 ATX-CPCI WIRE ASM 1
29
#05
401-72724 ATX-CPCI WIRE ASM3 1
30 401-29648 POSITION BOARD 1
31 401-29627 OPTICAL FIBER CABLE 1M 1
32 401-29652 X AXIS DRIVER 1
33 401-28968 TB1-FX AMP WIRE ASM 1
34
#01
401-29307 TB1-FX AMP WIRE ASM(EN) 1
35 401-28974 FX AMP-FG WIRE ASM 1
36 401-29334 FX AMP-XY BEAR ENC CABLE ASM 1
37 401-29313 FX AMP-Y BEAR PWR CABLE ASM 1
38 401-33055 XY BEAR CABLES ASM1 1
39 401-29148 X-MOTOR ENC CABLE ASM 1
40 400-44546 X MTR PWR CABLE 1
41 401-29630 XY LINEAR SCALE HEAD 1
42 401-29653 X AXIS MOTOR 1
43 401-28969 TB1-FYL AMP WIRE ASM 1
44
#01
401-29308 TB1-FYL AMP WIRE ASM(EN) 1
45 401-28975 FYL AMP-FG WIRE ASM 1
46 401-29654 Y AXIS DRIVER 1
47 401-29627 OPTICAL FIBER CABLE 1M 1
48 401-33057 Y BEAR CABLES ASM 1
49 401-29264 FYL AMP-Y BEAR ENC CABLE ASM 1
50 401-29314 FYL AMP-Y BEAR PWR CABLE ASM 1
51 401-29124 Y LINEAR MTR WIRE ASM 1
52 401-28970 TB1-FYR AMP WIRE ASM 1
53
#01
401-29309 TB1-FYR AMP WIRE ASM(EN) 1
54 401-28976 FYR AMP-FG WIRE ASM 1
55 401-29265 FYR AMP-Y BEAR ENC CABLE ASM 1
56 401-29628 OPTICAL FIBER CABLE 0.15M 1
57 401-29316 FYR AMP-Y BEAR PWR CABLE ASM 1
58 401-29635 OPTICAL FIBER 1.7M 1
59 HK-0852900-20 CONNECTOR 1
60 401-33055 XY BEAR CABLES ASM1 1
61 401-29315 Y BEAR-YR MTR G CABLE ASM 1
62 401-29316 FYR AMP-Y BEAR PWR CABLE ASM 1
63 401-28874 HEAD RELAY PCB ASM 1
64 401-29650 4AXIS INTEGRAL TYPE T AXIS DRIVER 1
65 401-33051 HDR-ZA AMP PWR CABLE ASM 1
66 401-33052 HDR-ZB AMP PWR CABLE ASM 1
67 401-33053 HDR-ZC AMP PWR CABLE ASM 1
68 401-28971 TB2-RX AMP WIRE ASM 1
69
#01
401-29310 TB2-RX AMP WIRE ASM(EN) 1
70 401-28977 RX AMP-FG WIRE ASM 1
71 401-29335 RX AMP-XY BEAR ENC CABLE ASM 1
72 401-29317 RX AMP-Y BEAR PWR CABLE ASM 1
73 401-28972 TB2-RYL AMP WIRE ASM 1
74
#01
401-29311 TB2-RYL AMP WIRE ASM(EN) 1
75 401-28978 RYL AMP-FG WIRE ASM 1
76
#01
401-29312 TB2-RYR AMP WIRE ASM(EN) 1
77 401-29267 RYL AMP-Y BEAR ENC CABLE ASM 1
78 401-29318 RYL AMP-Y BEAR PWR CABLE ASM 1
79 401-28973 TB2-RYR AMP WIRE ASM 1
80 401-28985 TB3-RYR AMP WIRE ASM 1
81 401-29268 RYR AMP-Y BEAR ENC CABLE ASM 1
82 401-29319 RYR AMP-Y BEAR PWR CABLE ASM 1
83 401-29629 OPTICAL FIBER CABLE 3.8M 1
84 401-28980 TB3-FX AMP WIRE ASM 1
85 401-28981 TB3-FYL AMP WIRE ASM 1
86 401-28982 TB3-FYR AMP WIRE ASM 1
87 401-28983 TB3-RX AMP WIRE ASM 1
88 401-28984 TB3-RYL AMP WIRE ASM 1
89 401-28979 RYR AMP-FG WIRE ASM 1
90 401-29336 MTS I/F BR CABLE ASM 1
91 401-29338 RC UNIT WIRE ASM 1
92 401-29670 REGENERATIVE CAPACITOR UNIT 1
93 401-28988 Y BEAR-YR SCALE CABLE ASM 1
94 401-33058 EU TOP-F XY BEAR AMP PWR CABLE ASM 1
95 401-33059 EU TOP-R XY BEAR AMP PWR CABLE ASM 1
96 401-33060 XY BEAR AMP PWR-FG WIRE ASM 1
97 401-33142 T AXIS MOTOR BP 1
98 401-33141 Z AXIS MOTOR 1
99
#02
401-33142 T AXIS MOTOR BP 1
100
#03
401-33143 T AXIS MOTOR AK 1
101
#02
401-33141 Z AXIS MOTOR 1
102 401-29302 NF-SW WIRE ASM 1
103
#04
401-29669 TRANSFORMER(MULTIPLE INPUT) 1
104
#05
401-58135 TRANSFORMER(MULTIPLE INPUT) 1
105 401-28957 TF34-EU BTM WIRE ASM 1
106
#04
400-48006 ATX PSU 1
107
#05
EZ-1468979-11 POWER (ENSP-300P-S20-11S) 1
108
#04
401-29625 CPCI BACK BOARD 6SLOT 1
109
#05
401-72512 CPCI BACK BOARD 6SLOT 1
110
#06
401-33142 T AXIS MOTOR BP 1
111
#07
401-33143 T AXIS MOTOR AK 1
- -
67.SYSTEM DIAGRAM(HEAD IF BLOCK)
V A C U U M
U N I T
V A C U U M U N I T
F I B E R
F I B E R
F I B E R
Z 2 S E N S O R
Z 3 S E N S O R
Z 4 S E N S O R
Z 5 S E N S O R
Z 6 S E N S O R
Z 1 S E N S O R
Z 2 S E N S O R
Z 3 S E N S O R
Z 4 S E N S O R
Z 5 S E N S O R
Z 6 S E N S O R
Z 1 S E N S O R
Z 6 V
Z 5 V
Z 4 V
Z 3 V
Z 2 V
Z 1 V
Z 6 B
Z 5 B
Z 4 B
Z 3 B
Z 1 B
Z 2 B
Z 6 V
Z 5 V
Z 4 V
Z 3 V
Z 2 V
Z 1 V
Z 6 B
Z 5 B
Z 4 B
Z 3 B
Z 1 B
Z 2 B
L N C - 3
O P T I O N ( S O L D E R R E C )
O P T I O N ( S O L D E R R E C )
O C C R
O C C L
O C C R
O C C L
3 - 1 B
2 - 1 B
2 - 3 B
1 -2 D
3 - 1 C
2 - 1 B
2 - 3 B
1 -3 D
3 - 1 A
2 - 1 B
2 - 3 B
1 -3 D
5 - 1 A
1 -3 D
1 - 4 D1 - 4 B
1 - 5 C
1 - 5 C
1 - 4 C
1 - 5 A
1 - 5 A
1 - 4 A
3 n o z z l e s
O P T I O N ( SO L D E R R E C )
O P T I O N ( SO L D E R R E C )
C N 0 6 3 2
O C C - O 2
O C C - A 2
O C C - C 2
O C C - O 1
O C C - A 1
O C C - C 1
C N 0 6 3 2
O C C - O 2
O C C - A 2
O C C - C 2
O C C - O 1
O C C - A 1
O C C - C 1
C N 0 6 11 B
C N 1 1 B
C N 0 6 11 B
C N 11 B
C N 0 3 0 6
C N 0 4 0 6
E P V
L N C
E P V - 1
L N C - 1
C N 0 4 1 1
C N 0 3 1 0
C N 0 0 6 1
C N 0 6 1 4
C N 0 6 0 1
C N 0 6 1 0
X Y B E A R
C A B L E S
A S M 2 ( R )
L A N 4
C N 0 0 0 4
E L E C T R I C A L U N I T
< T O P U N I T >
C N 4
C N 6
I O C O N T R O L P C B
C N 0 7 0 4
C N 4
I L L U M IN A T I O N
U N I T
P O W E R
E T H E RE N C
E T H E R
Z T A C N 5
Z T B C N 5
Z T C C N 5
Z T A C N 6
C N 0 7 1 7
C N 0 7 0 1
C N 0 7 1 3
C N 0 7 0 3
C N 1 3
C N 3
C N 0 6 1 5
C N 0 6 0 3
C N 6
T 3 O R I G I N
S E N S O R
C N 0 7 4 1
T 2 O R I G I N
S E N S O R
C N 0 7 4 0
T 1 O R IG I N
S E N S O R
C N 0 7 3 9C N 0 7 0 7
C N 7
N O Z Z L E
U P
S E N S O R
C N 0 7 0 9
N O Z Z L E
U P
S E N S O R
C N 9
C N 0 7 0 8
C N 1 5
Z 6 V A C U U M S E N S O R ( 6 n o z z l e )
U N U S E D ( 3 n o z z l e )
Z 5 V A C U U M S E NS O R ( 6 n o z z l e s )
Z 3 V A C U U M S E NS O R ( 3 n o z z l e s )
Z 4 V A C U U M S E NS O R ( 6 n o z z l e s )
U N U S E D ( 3 n o z z le s )
Z 3 V A C U U M S E NS O R ( 6 n o z z l e s )
Z 2 V A C U U M S E NS O R ( 3 n o z z l e s )
Z 2 V A C U U M S E NS O R ( 6 n o z z l e s )
U N U S E D ( 3 n o z z le s )
C N 0 7 1 5
Z 1 V A C U U M S E NS O R ( 6 n o z z l e s )
Z 1 V A C U U M S E NS O R ( 3 n o z z l e s )
C N 8
Z 6 V A C U U M S . V. ( 6 n o z z l e s )
U N U S E D ( 3 n o z z le s )
Z 5 V A C U U M S . V . ( 6n o zz l e s )
Z 3 V A C U U M S . V . ( 3n o zz l e s )
Z 4 V A C U U M
S . V . ( 6 n o z z l e s)
U N U S E D ( 3 n o z z le s )
Z 3 V A C U U M S . V . ( 6n o zz l e s )
Z 2 V A C U U M S . V . ( 3n o zz l e s )
Z 2 V A C U U M S . V. ( 6 n o z z l e s )
U N U S E D ( 3 n o z z le s )
Z 1 V A C U U M S . V . ( 6n o zz l e s )
Z 1 V A C U U M S . V . ( 3n o zz l e s )
Z 6 B L O W S . V . (6 n o z z l e s )
U N U S E D ( 3 n o z z le s )
Z 5 B L O W S .V . ( 6 n o z z le s )
Z 3 B L O W S .V . ( 3 n o z z le s )
Z 4 B L O W S . V . (6 n o z z l e s )
U N U S E D ( 3 n o z z le s )
Z 3 B L O W S .V . ( 6 n o z z le s )
Z 2 B L O W S .V . ( 3 n o z z le s )
Z 2 B L O W . V . ( 6n o z z l e s )
U N U S E D ( 3 n o z z le s )
C N 0 7 10
Z 1 B L O W S .V . ( 6 n o z z le s )
Z 1 B L O W S V( 3 n o z z l e s)
C N 1
C N 0 6 0 6
C N 0 6 0 7
T H E R M A L
S E N S O R
P C B ( R )
N Z L U P S . V.
H M S ( R R )
C N 0 6 3 1C N 0 6 0 9
H M S ( R L )
C N 0 6 3 0C N 0 6 0 8
C N 0 6 1 3
O C C O
P C B ( R R )
O C C A
P C B ( R R )
O C C C
P C B ( R R )
C N 0 6 1 2
O C C O
P C B ( R L )
O C C A
P C B ( R L )
O C C ( R L )
O C C ( R R )
O C C C
P C B ( R L )
C N 0 6 11 A
C N 6
C N 7
C N 9
C N 8
C N 4
L N C 1 20 ( R )
C N 5
Z T C S E R V O
D R I V E R ( R )
C N 5
Z T B S E R V O
D R I V E R ( R )
C N 6
C N 2
( D O W N )
I P - X 1 1 P C B
C N 3
C N 5
C N 1 3
C N 1 2
C N 1 0
C N 1 1 A
C N 10
C N 1 4
C N 5
C N 1 7
H E A D R E L A Y
P C B ( R )
H E A D M A I N
P C B ( R )
C N 1
E N C
C N 5
E P V1 2 0 ( R )
Z T A S E R V O
D R I V E R ( R )
C N 0 3 0 2
C N 0 4 0 5
E P V
L N C
E P V - 1
L N C - 1
C N 0 4 10
C N 0 3 0 9
C N 0 0 6 0
C N 0 6 1 4
C N 0 6 0 1
C N 0 6 1 0
X Y B EA R
C A B L ES
A S M 2 (F )
L A N 3
C P U B O A R D
C N 0 0 0 5
E L E C T R I C A L U N I T
< T O P U N I T >
C N 5
C N 2
I O C O N T R O L P C B
C N 0 7 0 4
C N 4
I L L U M I N A T I O N
U N I T
P O W E R
E T H E RE N C
E T H E R
Z T A C N 5
Z T B C N 5
Z T C C N 5
Z T A C N 6
C N 0 7 1 7
C N 0 7 01
C N 0 7 1 3
C N 0 7 0 3
C N 1 3
C N 3
C N 0 6 1 5
C N 0 6 0 3
C N 6
N O Z Z L E U P
S E N S O R
C N 0 7 0 9
N O Z Z L E U P
S E N S O R
C N 9
C N 0 7 0 8
C N 1 5
Z 6 V A C U U M
S E N S O R
Z 5 V A C U U M
S E N S O R
Z 4 V A C U U M
S E N S O R
Z 3 V A C U U M
S E N S O R
Z 2 V A C U U M
S E N S O R
C N 0 7 1 5
Z 1 V A C U U M
S E N S O R
C N 8
Z 6 V A C U U M S . V .
Z 5 V A C U U M S . V .
Z 4 V A C U U M S . V .
Z 3 V A C U U M S . V .
Z 2 V A C U U M S . V .
Z 1 V A C U U M S . V .
Z 6 B L O W S . V .
Z 5 B L O W S . V .
Z 4 B L O W S . V .
Z 3 B L O W S . V .
Z 2 B L O W S . V .
C N 07 1 0
Z 1 B L O W S . V.C N 1
C N 0 6 0 6
C N 0 6 0 7
T H E R M A L
S E N S O R
P C B ( F )
N Z L U P S . V .
H M S ( F R )
C N 0 6 3 1C N 0 6 0 9
H M S ( F L )
C N 0 6 3 0C N 0 6 0 8
C N 0 6 1 3
O C C O
P C B ( F R )
O C C A
P C B ( F R )
O C C C
P C B ( F R )
C N 0 6 1 2
O C C O
P C B ( F L )
O C C A
P C B ( F L )
O C C ( F L )
O C C ( F R )
O C C C
P C B ( F L )
C N 0 6 11 A
C N 6
C N 7
C N 9
C N 8
C N 4
L N C 1 2 0 ( F )
C N 5
Z T C S E R V O
D R I V E R ( F )
C N 5
Z T B S E R V O
D R I V E R ( F )
C N 5
C N 2
( U P)
I P - X 1 1 P C B
C N 3
C N 5
C N 1 3
C N 1 2
C N 10
C N 11 A
C N 1 0
C N 1 4
C N 5
C N 1 7
H E A D R E L A Y
P C B ( F )
H E A D M A I N
P C B ( F )
C N 1
E N C
C N 5
E P V 1 2 0 ( F)
Z T A S E R V O
D R I V E R ( F )
1
3
22
3
4
5 6
7 8
9 1 0 1 1
1 2
1 3 1 3 1 3
1 5
1 4
2 0
2 1
2 2
2 3
2 5
2 4
2 4 2 6 2 7
2 8
3 9
2 6 2 7
2 8
3 2
3 0 3 1
3 2
3 3 3 4
3 5
3 83 73 6
1 9
1 7 1 8
1 6
2
3
2
3
4
4 2
5
4 3
6
4 4
7 8
1 2
1 5
1 4
1 3 1 31 3
2 0
2 1
2 3
2 2
2 4
2 4 2 6 2 7
2 8
2 5
2 6 2 7
2 8
3 2 3 2
3 0 3 1 3 3 3 4
3 5
2 9
5 0
1 6
1 7 1 8
1 9
3 6
5 0
3 7
4 0 4 1 4 5 4 6
4 7
4 9
4 8 4 8 4 8
4 9 4 9
2 9
L N C - 3
E P V 1 2 0 O P T I ON ( F )
F I B E R
6 n o z z l es _ 6 R
T 3 O R I G I N S E N S OR
C N 0 7 07
C N 7
E P V1 2 0 O P T I O N (R )
5 1
5 2
5 2
5 1
C N 0 7 0 7
T 3 O RI G I N S E N S O R
6 n o z z l e s _ 6 R
F I B E R
- -
REF.NO NOTE PART NO D E S C R I P T I O N Qty
1 401-23242 CPU BOARD 1
2 HW-0018100-8A SHIELDED CABLE 1
3 HK-0849200-80 CONNECTOR 1
4 401-29131 XY BEAR CABLES ASM2 1
5 401-33294 IP-X11 SET GEN ASM 1
6 401-28871 IO CONTROL PCB ASM 1
7 401-27537 PSU_UNIT_B(ST) 1
8
#01
401-27563 PSU_UNIT_B(EN) 1
9 401-29099 IPX-F XY BEAR CAMERA CABLE ASM 1
10 401-29325 IO-F XY BEAR SERIAL CABLE ASM 1
11 401-29101 EU TOP-F XY BEAR HDM PWR CABLE ASM 1
12 401-28873 HEAD MAIN PCB ASM 1
13 401-29650 4AXIS INTEGRAL TYPE T AXIS DRIVER 1
14 401-33023 TAMP-HDR ENC CABLE ASM 1
15 401-33063 TAMP-HDR SERIAL CABLE ASM 1
16 401-28874 HEAD RELAY PCB ASM 1
17 401-29657 EPV120 1
18 401-29658 LNC120 1
19 401-28996 HR-LNC LED WIRE ASM 1
20 401-29104 HDM-HDR SERIAL CABLE ASM 1
21 401-29105 HDM-HDR PWR CABLE ASM 1
22 401-29102 HDM-OCC L CABLE ASM 1
23 401-29103 HDM-OCC R CABLE ASM 1
24 401-29639 OCC 1
25 401-29273 HDM-OCC LIGHT L CABLE ASM 1
26 401-28879 OCC C PCB ASM 1
27 401-28878 OCC A PCB ASM 1
28 401-28880 OCC O PCB ASM 1
29 401-29274 HDM-OCC LIGHT R CABLE ASM 1
30 401-29106 HDM-HMS L RELAY CABLE ASM 1
31 401-29107 HDM-HMS R RELAY CABLE ASM 1
32 401-29108 HMS CABLE ASM 1
33 401-29113 NZL-UP SV CABLE ASM 1
34 401-29109 HDM-TMP SENSOR CABLE ASM 1
35 401-28883 THERMAL SENSOR PCB ASM 1
36 401-33000 HDR-SV CABLE ASM 1
37 401-33001 HDR-Z VAC SENSOR CABLE ASM 1
38 401-33002 NZL UP SENSOR 6T L CABLE ASM 1
39 401-33003 NZL UP SENSOR 6T R CABLE ASM 1
40
#02
401-33002 NZL UP SENSOR 6T L CABLE ASM 1
41
#03
401-33020 NZL UP SENSOR 3T L CABLE ASM 1
42 401-29115 IPX-R XY BEAR CAMERA CABLE ASM 1
43 401-29326 IO-R XY BEAR SERIAL CABLE ASM 1
44 401-29117 EU TOP-R XY BEAR HDM PWR CABLE ASM 1
45
#02
401-33003 NZL UP SENSOR 6T R CABLE ASM 1
46
#03
401-33021 NZL UP SENSOR 3T R CABLE ASM 1
47
#03
401-33004 HDR-T ORG RELAY CABLE ASM 1
48
#02
401-33005 T ORG SENSOR CABLE ASM 1
49
#03
HD-0028500-40 SENSOR 1
50 401-32730 VACUUM UNIT 1
51
#04
401-65940 T3 ORG SENSOR CABLE ASM 1
52
#04
HD-0028500-40 SENSOR 1