4M184002w_F8S - 第107页

4OM-1840 1-4-32 1604-001 4.7.7 V acuum Filter Change Cycle : Every 3 Months (Required Time : 30 minutes) Filter Holder Fig. 4A4-43 Procedure   …

4OM-1840

1-4-311604-001

4.7.6 Nozzle Change Cam Surface (Upper) Cleaning and Oiling

Cycle : Every 3 Months (Required Time : 5 minutes)

Grease : DAPHNE GREASE MP No.1

Nozzle Change Cam Face

Fig. 4A4-41

Procedure

(1) If a foreign substance adheres to the cam face, remove it with a pair of

tweezers.

(2) Apply grease (0.01 cc) to the upper side of the cam face with a syringe.

Note

(a) "0.01 cc" is almost equivalent to the size of "1005 Chip".

(b) Use No. 19 (brown) nozzle.

No.19

Fig. 4A4-42

4.7 Head Section

4OM-1840

1-4-321604-001

4.7.7 Vacuum Filter Change

Cycle : Every 3 Months (Required Time : 30 minutes)

Filter Holder

Fig. 4A4-43

Procedure

  

removal jig.

 

Filter Holder

Filter

Fig. 4A4-44

NOTICE

Make sure of the lter folder insertion direction, and

then insert the folder securely to the end.

Make sure that the lter folder upper surface is

aligned with the top block upper surface.

4.7 Head Section

4OM-1840

1-4-331604-001

4.7 Head Section

4.7.8 Head U/D Ball Screw (high-speed multi-purpose head) Cleaning and

Oiling

Cycle : Every 3 Months (Required Time : 5 minutes)

Grease : DAPHNE GREASE MP No.1

Head U/D Ball Screw (HL Axis)

Fig. 4A4-44-1

Procedure

(1) Wipe old grease out using a rag.

(2) Apply grease in the ball screw groove slightly using the syringe.

Note

Use No. 19 (brown) nozzle.

No.19

Fig. 4A4-44-2

 

manual axis operation to smooth the grease.