4M184002w_F8S - 第118页
4OM-1840 1-4-43 1604-001 4.9 PCB Positioning Section Upper Surface of Backup Table Every Week Cleaning Required Time: 2 minutes Ball Screws (3 locations) Every 3 Months Cleaning and Lubrication (DAPHNE EPONEX GREASE No. …

4OM-1840
1-4-421604-001
4.8.6 Y-axis Cable Fixing Location Check
Cycle : Every 6 Months (Required Time : 1 minute)
Y-Axis Cable Fixing Location
Fig. 4A4-53
Procedure
Check visually for any abnormality such as cracks.
4.8.7 Y-axis Linear Encoder Scale-Tape Cleaning
Cycle : Every 6 Months (Required Time : 5 minutes)
Linear Encoder Scale-Tape
Fig. 4A4-54
Procedure
When it is very dirty, clean it using a cloth soaked in alcohol.
4.8 X/Y Beam Section

4OM-1840
1-4-431604-001
4.9 PCB Positioning Section
Upper Surface of Backup Table
Every Week Cleaning
Required Time: 2 minutes
Ball Screws (3 locations)
Every 3 Months Cleaning and Lubrication
(DAPHNE EPONEX GREASE No. 1)
Required Time: 10 minutes
Fig. 4A4-55
Upper Surface of Backup Table
Every Week Cleaning
Required Time: 2 minutes
The nipple are located on the lower side
of the backup table.
Ball Screw Spline (Four places to nipple)
Every 6 Months Cleaning and Lubrication
(DAPHNE EPONEX GREASE No. 1)
Required Time: 10 minutes
Note
Ball Screws (3 locations)
Every 3 Months Cleaning and Lubrication
(DAPHNE EPONEX GREASE No. 1)
Required Time: 10 minutes
Fig. 4A4-55-1 Y510mm Single Transfer Unit
Note
Either Y510mm or Y250mm single transfer unit can be selected when the
system is delivered from the factory.
4.9 PCB Positioning Section

4OM-1840
1-4-441604-001
4.9.1 Backup Table Upper Surface Cleaning
Cycle : Every Week (Required Time : 2 minutes)
Backup Table Upper Surface
Fig. 4A4-56
Procedure
Remove foreign substances and unrequired components and suck dirt and dust
with a vacuum cleaner.
Note
Either Y510mm or Y250mm single transfer unit can be selected when the system is
delivered from the factory.
4.9 PCB Positioning Section