4M184002w_F8S - 第138页
4OM-1840 1-5-3 1604-001 5.2 Method of detaching vacuum nozzle 5.2 Method of detaching vacuum nozzle • Store the nozzle in the nozzle stocker (housing) through window navigations and take out the nozzle stocker (housing).…
4OM-1840
1-5-2
1604-001
5.1 Cleaning Method of Vacuum Nozzles
5.1 Cleaning Method of Vacuum Nozzles
Remove Nozzle Filter
Refer to "5.3 Nozzle Filter Removal Procedure"
for details.
Blow air Vacuum Nozzle
Confirm that there is no clog in pick-up hole
Refer to "5.4 Method of Blow air" for details.
Confirm the clog in the top of pick-up hole by
the magnifying glass.
Refer to "5.5 Cleaning of high-speed nozzle
hole part with pin gauge" for details.
Remove Vacuum Nozzle
Refer to "5.2 Method of detaching vacuum
nozzle" for details.
Insert the nozzle filter
Refer to "5.6 Nozzle Filter Insertion Procedure"
for details.
Reference
Reference
Reference
Reference
Reference
Fig. 4A5-2
NOTICE
In the case that the ultra-sonic cleaning method and
solvent are used for the nozzle cleaning operation,
the adhesive applied onto the nozzle joint section
would be degraded, which could cause adhesive
ablation and damage to the nozzle unit.
4OM-1840
1-5-3
1604-001
5.2 Method of detaching vacuum nozzle
5.2 Method of detaching vacuum nozzle
•
Store the nozzle in the nozzle stocker (housing) through window
navigations and take out the nozzle stocker (housing).
Notice
(a) Do not take out a nozzle from the head by hand. Otherwise, the
nozzle does not conform to the nozzle data.
(b) When the ultrasonic cleaning operation is to be performed
underwater, remove the nozzle lter.
Do not use anything other than water for the cleaning.
(c) Demagnetize the vacuum nozzle after the detachment.
Keep the head section free of any magnetic eld.
As an example,
•
Do not bring a magnet close to the head section.
•
Do not bring any demagnetizer to the head section.
Demagnetize the vacuum nozzle each unit.
Reference
Refer to "5. Nozzle Change Window" in "Chapter 6 (Vol. 2)" for the
procedure of nozzle storage.
4OM-1840
1-5-4
1604-001
5.3 Nozzle Filter Removal Procedure
5.3 Nozzle Filter Removal Procedure
Filter Removing Jig
Vacuum Nozzle
Push
Pushing out the nozzle filter.
Fig. 4A5-3
Note