4M184002w_F8S - 第139页

4OM-1840 1-5-4 1604-001 5.3 Nozzle Filter Removal Procedure 5.3 Nozzle Filter Removal Procedure   Filter Removing Jig Vacuum Nozzle Pu…

4OM-1840

1-5-3

1604-001

5.2 Method of detaching vacuum nozzle

•

Store the nozzle in the nozzle stocker (housing) through window

navigations and take out the nozzle stocker (housing).

Notice

(a) Do not take out a nozzle from the head by hand. Otherwise, the

nozzle does not conform to the nozzle data.

(b) When the ultrasonic cleaning operation is to be performed

underwater, remove the nozzle lter.

Do not use anything other than water for the cleaning.

Keep the head section free of any magnetic eld.

As an example,

•

Do not bring a magnet close to the head section.

•

Do not bring any demagnetizer to the head section.

Demagnetize the vacuum nozzle each unit.

Reference

Refer to "5. Nozzle Change Window" in "Chapter 6 (Vol. 2)" for the

procedure of nozzle storage.

4OM-1840

1-5-4

1604-001

5.3 Nozzle Filter Removal Procedure





Filter Removing Jig

Vacuum Nozzle

Push

Pushing out the nozzle filter.

Fig. 4A5-3

Note

 

4OM-1840

1-5-5

1604-001

5.4 Method of Blow air

•

Remove dust and dirt etc.



Clean the tapered area of the vacuum nozzle with a lens cleaning cloth.

Notice

Use clean, dry, and non-lubricated air for blow air.

Fig. 4A5-4

NOTICE

Blow air to the head when blow air to the nozzle.

There is a possibility that the clamp jaw breaks when

the air blow is done from the direction of the clamp

jaw to the nozzle.