4M184002w_F8S - 第146页

4OM-1840 1-6-1 1604-001 6. Use Procedure of Diusion Plate Setup Jig 6. Use Procedure of Diusion Plate Setup Jig Procedure     Outer Diffusion Plate Inner Di…

4OM-1840

1-5-10

1604-001

5.6 Nozzle Filter Insertion Procedure

(3) Insert the nozzle into the nozzle set position. At this time, face the nozzle



of white arrow).

Note

Make sure to face the nozzle clearance in the correct direction.

Nozzle clearance for nozzle filter

must face in this direction.

Nozzle

F4A60A

(4) Press the acrylic block and move the slider in the direction of white arrow to



Slider

Acrylic block

F4A62A

(5) Press the lever to detach the nozzle. At this time, a click is heard.

Acrylic block

Press the lever.

F4A82

4OM-1840

1-6-1

1604-001

6. Use Procedure of Diusion Plate Setup Jig

Procedure

  

Outer Diffusion Plate

Inner Diffusion Plate

Fig. 4A6-1

(2) Attach the Jigs No. 1 and No. 2 onto the three locations as shown in the



Take care not to damage the linear measure sensor.

Jig 1 Jig 2

Fig. 4A6-2

4OM-1840

1-6-2

1604-001

 

Fig. 4A6-3

6. Use Procedure of Diusion Plate Setup Jig