4M184002w_F8S - 第223页
Error ID Error Name, Description, Cause, and Remedy 49074D Nozzle set up Error in coordinate calculation of Noz Stocker Mark position. ----- 49074E Nozzle set up Error in coordinate calculation of detect starting positio…
Error ID Error Name, Description, Cause, and Remedy
49073F Nozzle set up
Time-out of Nozzle type data received.
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490740 Nozzle set up
Error of Nozzle type data received.
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490741 Nozzle set up
Error in updating Nozzle data.
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490742 Nozzle set up
Failed in start-up Z-axis
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490743 Nozzle set up
Time-out of start-up Head
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490744 Nozzle set up
Time-out of head
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490745 Nozzle set up
Error in calculating Noz exchanging position in L-axis
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490746 Nozzle set up
Failed in start-up L-axis
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490747 Nozzle set up
Time-out of start-up L-axis
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490748 Nozzle set up
Time-out of L-axis
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490749 Nozzle set up
Error in calculating Noz exchanging position in XY-axis
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49074A Nozzle set up
Error in calculating Noz exchanging position in L-axis.
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49074B Nozzle set up
Failed in getting arrangement data of Nozzle Stocker
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49074C Nozzle set up
Nozzle is found in Stocker, but Disagreement ID or ID recog failed.
Please conrm the type and direction of Noz inside Stocker.
Check the existence of the dirt or aw if there is no problem.
3.6 Automatic Adjustment
4OM-1840
3-3-611604-001
Error ID Error Name, Description, Cause, and Remedy
49074D Nozzle set up
Error in coordinate calculation of Noz Stocker Mark position.
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49074E Nozzle set up
Error in coordinate calculation of detect starting position for Linear Measure.
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49074F Nozzle set up
Error in coordinate calculation of detect nishing position for Linear Measure
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490750 Nozzle set up
Error in coordinate calculation of recog position of Noz ID
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490751 Nozzle set up
Error in coordinate calcualtion of recog position of Noz in Stocker
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490752 Nozzle set up
Error in coordinate calculation of exchange position of Noz (Placing Noz)
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490753 Nozzle set up
Error in calculating Placing height for Noz (Placing Noz)
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490754 Nozzle set up
Error in calculating Placing height for Noz (Placing Noz)
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490755 Nozzle set up
Error in coordinate calculation of exchange position of Noz (Storing Noz)
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490756 Nozzle set up
Error in calculating Storing Height for Noz (Storing Noz)
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490757 Nozzle set up
Error in calculating Storing Height for Noz (Storing Noz)
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490758 Nozzle set up
Error in setting Sequence Data of XY-axis
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490759 Nozzle set up
Error in setting Drive Wave of DD-axis
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49075A Nozzle set up
Error in setting Drive Wave of NS-axis
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49075B Nozzle set up
Error in setting Drive Wave of Z-axis
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3.6 Automatic Adjustment
4OM-1840
3-3-621604-001
Error ID Error Name, Description, Cause, and Remedy
49075C Nozzle set up
XY Beam start-up has not be completed within predetermined time
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49075D Nozzle set up
Failed in XY-axis start-up
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49075E Nozzle set up
Failed in DD-axis start-up
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49075F Nozzle set up
Failed in NS-axis start-up
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490760 Nozzle set up
Failed in Z-axis start-up
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490761 Nozzle set up
XY-axis Operating has not been completed within predetermined time
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490762 Nozzle set up
Error in XY-axis operating
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490763 Nozzle set up
XY Beam Operating has not been completed within predetermined time
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490764 Nozzle set up
Error in setting Drive Wave of HL-axis
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490765 Nozzle set up
Error in setting Drive Wave of NL-axis
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490766 Nozzle set up
Error in setting Drive Wave of NL-axis
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490767 Nozzle set up
Error in setting Drive Wave of L-axis
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490768 Nozzle set up
Up/Down axis start-up has not been completed within predetermined time
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490769 Nozzle set up
Failed in HL-axis start-up
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49076A Nozzle set up
Failed in NL-axis start-up
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3.6 Automatic Adjustment
4OM-1840
3-3-631604-001