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4OM-1840 1604-001 1-B

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4OM-1840
1604-001 1-A
Chapter 1
Maintenance
In this chapter, all about maintenance are described.
1. Outline of Maintenance
2. Maintenance Check List
3. Maintenance Spots
4. Inspection, Cleaning, and Lubrication Spots
5. Maintenance Method
6. Use Procedure of Diusion Plate Setup Jig
7. Consumables and Servicing Parts
4OM-1840
1604-001 1-B
4OM-1840
1-1-11604-001
1. Outline of Maintenance
This session describes how to perform inspections, cleaning, lubrication, and
adjustment to keep the machine in good shape.
Be sure to periodically perform the maintenance tasks.
1.1 Notes on Maintenance
WARNING
Only a well-trained service person should perform maintenance
tasks carefully through the specied procedures.
Before maintenance work, shut o the power breaker and lock
the power breaker with the padlock.
Designate a person who can have charge of the padlock key.
If the provided padlock is lost or damaged, purchase its
substitute.
CAUTION
Even when the power breaker is set to "OFF", the primary line
is powered, making it possible to cause an electric shock.
Be sure to completely stop the power supply to the machine before
maintenance work.
Residual voltages may remain behind for a few minutes in the
internal devices of the machine after power interception.
Before performing maintenance work, wait until the charge lamps of

or more after the power breaker is set to "OFF".
Note
(a) Preliminary preparation is required for some maintenance tasks with the power being
supplied.
(b) Note that the linear measure sensors must be cleaned with the power being supplied.
Although the load power to the motors, etc., is turned OFF when the transparent cover
is opened, the maintenance must be performed carefully because you have to put your
hand(s) inside the machine.
1. Outline of Maintenance