5OM-1840-001w_F8S - 第81页
5OM-1840 1604-001 3-B

5OM-1840
1604-001 3-A
Chapter 3
Parts Location
This chapter describes the layout, etc., of each section.
As this contains highly sophisticated contents, it should carefully be
referred to.

5OM-1840
1604-001 3-B

5OM-1840
3-1-1
Parts Location
1604-001
Side Panel Front
Side Panel Center
Side Panel Rear
Power Breaker
Noise Filter
Lighting Control PCB
Servo Amplifier (Front)
CPU1
CPU2
Transfer Panel
Vacuum Pump
Relay PCB
Intensive PCB
Servo Amplifier (Rear)
DC Power Supply Unit
REAR
SIDE B
FRONT
SIDE A
Layout under the Base (General View)