4OM-1011-002 - 第180页
0305-001 Tg0860-PM-MM *4 [P .E.C. RECOG TEST [MOVE]] Key This key is used to perform the recognition test. When this key is selected and the [MOVE] button is pressed, the recognition test starts. *5 [X/Y BEAM ZERO [MOVE]…
0305-001 Tg0860-PM-MM
7.1 P.E.C. RECOG TEST Display
When the [P.E.C. RECOG TEST] key is pressed at the “DEVICE TEST” dis-
play, the following display appears on the screen.
Refer to the following sessions for detailed description of each data item.
Volume 2: “2.3.4 P.E.C. MARK DATA EDIT Display”
“5.10 P.E.C. RECOG CAMERA OFFSET Display”.
*1 P.E.C. RECOG CAMERA
Select the camera to be used for the P.E.C. recognition func-
tion.
<Options>
“CAM-A3” (Beam A)
“CAM-B3” (Beam B)
*2 FIDUCIAL MARK THETA
The parameter set in the “FIDUCIAL MARK THETA” data
box is unique for recognition test.
An angle must be set in the data box corresponding the
parameter set in the “MARK TYPE” data box at the “P.E.C.
MARK DATA EDIT” display.
Example:
Setting for equilateral triangle (upward)
: 0°
: 90°
: 180°
: 270°
*3 [X/Y BEAM MOVE] Key
When this key is pressed, the “X/Y BEAM MOVE” dis-
play appears on the screen.
7.1 P.E.C. RECOG TEST Display
3-128
Fig. 4C250
*1
*2
*3
*4
*5
*6
Fig. 4C251
Fig. 4C252
Fig. 4C253
0305-001 Tg0860-PM-MM
*4 [P.E.C. RECOG TEST [MOVE]] Key
This key is used to perform the recognition test.
When this key is selected and the [MOVE] button is pressed,
the recognition test starts.
*5 [X/Y BEAM ZERO [MOVE]] Key
This key is used to finish the P.E.C. recognition test and
zero the X/Y beam.
When this key is selected and the [MOVE] button is pressed,
the X/Y beam is zeroed.
*6 [RESULT OF RECOG.] Key
When this key is pressed, the “RESULT OF P.E.C. REC-
OGNITION” display appears on the screen.
The result of recognition appears after the P.E.C. recogni-
tion test is performed.
7.1.1 X/Y BEAM MOVE Display
When the [X/Y BEAM MOVE] key is pressed at the “P.E.C. RECOG TEST”
display, the following display appears on the screen.
When the [DESIGNATED POSITION] key is pressed at the following display,
another “X/Y BEAM MOVE” display (Fig. 4C258) appears on the screen.
7.1 P.E.C. RECOG TEST Display
3-129
Fig. 4C257
Fig. 4C254
Fig. 4C255
Fig. 4C256
0305-001 Tg0860-PM-MM
7.1 P.E.C. RECOG TEST Display
3-130
There are two ways to move the X/Y beam to the position where the fiducial
mark to be tested enters the visual field of the camera (window size).
• The X/Y beam (the beam related to the parameter set in the “P.E.C. RECOG
CAMERA” data box at the “P.E.C. RECOG TEST” display (Fig. 4C250))
can be moved.
Manual Alignment Operation (Fig. 4C257)
(1) Press one of the “DIRECTION” keys to select a direction and select one
of the “SPEED” keys to specify the speed of the X/Y beam movement.
(2) When the [MOVE] button is pressed, the X/Y beam starts moving in the
designated direction at the specified speed.
While the [MOVE] button is kept pressed, the X/Y beam keeps on mov-
ing.
X/Y Beam Movement to Designated Position (Fig. 4C258)
(1) Select the “X AXIS POSITION” and “Y AXIS POSITION” data boxes
under the label “X/Y BEAM LOCATION MODE” and enter parameters
using the ten-key pad.
(2) When the [MOVE] button is pressed, the X/Y beam moves to the desig-
nated position.
Fig. 4C258