Oxford-100-Manual.pdf - 第102页

PlasmalabSystem 100 Oxford Instruments Plasma Technology System Manual 5.8.2 Robot control page Fig 5.13: Robot control page The Robot Control page is used to manually transfer a wafer between chambers (when operating in…

100%1 / 362
System
Manual
Oxford
Instruments
Plasma
Technology
PlasmalabSystem100
ii) STOP buttons: Select
to
stop
either
pumping
down
or
venting
the
associated chamber.
Note
that
the
STOP
button
must be selected
before
venting
to
ensure
the
correct sequencing
of
the
valves.
iii)
VENT
buttons:
Select
to
vent
the
associated chamber.
b) Mimics
of
all valves
showing
open/closed status (coloured green
when
open, red
when
closed).
c)
Rotary/dry
pump
controls. Clicking
on
a
rotary
vane/dry
pump
mimic
button
will
switch
the
associated
pump
on
or
off
(a
running
rotary
pump
is
indicated by
animation).
d) Transfer arm,
Wafer
lift
and
Wafer
clamp status panel. Displays indicators
for
ARM
HOME, ARM
EXTENDED
and ARM FAULT
(illuminated
when
active). Also displays
WAFER
LIFT
and
WAFER
CLAMP status (up,
down,
moving
or
fault).
See
the
following
table.
MessaQe
MeaninQ
UP
The
UP
microswitch
is
detected
as
active.
DOWN
The DOWN microswitch
is
detected
as
active.
MOVING Both microswitches are detected
as
inactive.
FAULT Both microswitches are detected
as
active.
e)
The run status
of
the
turbo
pump
is
indicated
by
an associated message panel
containing
an indicator.
While
the
turbo
pump
is
running
up
to
speed,
the
message
'accelerating'
is
displayed and
the
indicator
is
flashing
yellow.
While
the
turbo
pump
is
at
its
operating
speed,
the
message
'at
speed'
is
displayed and
the
indicator
is
green.
f)
A
SET
BASE
PRESSURE
button.
Select
to
set
the
Process
Chamber
Base
Pressure.
g)
Context
related message panels
for
the
process chamber,
Automatic
load lock and
wafer
transfer
progress.
h) 'Ready
for
transfer'
indicators (
....
~)
- displayed
when
the
associated chamber
or
load
lock
is
evacuated and ready
for
wafer
transfers.
Printed: 22-Mar-06. 10:42
Operating
Instructions
Page 5-35
of
52
UC
Davis 94-721001
Issue
1:
March 06
PlasmalabSystem100
Oxford
Instruments
Plasma
Technology
System Manual
5.8.2
Robot
control
page
Fig 5.13: Robot controlpage
The
Robot
Control page
is
used
to
manually
transfer a
wafer
between
chambers (when
operating
in
automatic
mode, i.e.
running
a recipe,
wafers
are transferred automatically). The
location
of
the
wafer
is
indicated by a green
wafer
indicator. The
arrowed
path
shows
the
currently
available
wafer
destination.
The page provides
the
following
features:
Show
Pumps
button
Transfer arm
and
Wafer
lift
status panel
Transfer
status
message
field
Process
chamber and
Automatic
load
lock
mimic
Displays
the
Pump Control page
Displays indicators
for
ARM HOME, ARM
EXTENDED
and ARM FAULT
(illuminated
when
active). Also displays WAFER
LIFT
and
WAFER
CLAMP
status (up
or
down).
Displays
context-related
message
about
the
wafer
transfer
progress.
Displays
the
wafer
location
and possible
wafer
destination.
To transfer a
wafer
from
the
Automatic
load lock
to
the
process chamber
to
carry
out
a
manual process, use
the
following
steps:
1)
Click
on
the
Automatic
load lock
wafer
mimic. The
blue
arrowed
path
is
displayed
showing
the
available destination.
UC
Davis 94-721001
Issue
1:
March 06
Operating
Instructions
Page 5-36
of
52
Printed: 22-Mar-06. 10:42
System
Manual
Oxford
Instruments
Plasma
Technology
PlasmalabSystem100
5.8.3
2)
Click
on
the
process chamber
wafer
indicator. The
wafer
is
transferred
to
the
process
chamber.
To
transfer
a
wafer
from
a process chamber
to
the
Automatic
load lock on
completion
of
a
manual process, use
the
following
steps:
1)
Click
on
the
process chamber's green
wafer
indicator. The
blue
arrowed
path
is
displayed
showing
the
available destination.
2)
On
the
Automatic
load
lock mimic, click on
the
wafer
indicator. The
wafer
is
transferred
to
the
Automatic
load lock.
Recipe
page
Fig 5.14: Recipepage
The recipe
page
is
used
to
create,
edit
and run recipes.
See
sub-section 5.4.5
(Automatic
process run, page 5-16) and sub-section
5.5
(Creating and
editing
recipes, page 5-21).
The facilities
on
this page are:
Automatic
button
Select
to
carry
out
an
automatic
process run using a recipe. The
button's
indicator
is
coloured
yellow
when
selected.
The recipe
will
be
performed
on
a substrate. The substrate
will
start
at
the
normal
wafer
entry
point
and
will
be
automatically
transferred
to
each chamber,
as
the
recipe requires.
At
the
end
of
processing,
the
wafer
will
be
returned
to
its
starting
point.
Printed: 22-Mar-06, 10:42
Operating
Instructions
Page 5-37
of
52
UC
Davis 94-721001
Issue
1:
March 06