Oxford-100-Manual.pdf - 第104页

PlasmalabSystem 100 Oxford Instruments Plasma Technology System Manual Manual button Recipe Name field Data Log Interval field Created field Recipe length field Recipe step list New button Load button Save button Run but…

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System
Manual
Oxford
Instruments
Plasma
Technology
PlasmalabSystem100
5.8.3
2)
Click
on
the
process chamber
wafer
indicator. The
wafer
is
transferred
to
the
process
chamber.
To
transfer
a
wafer
from
a process chamber
to
the
Automatic
load lock on
completion
of
a
manual process, use
the
following
steps:
1)
Click
on
the
process chamber's green
wafer
indicator. The
blue
arrowed
path
is
displayed
showing
the
available destination.
2)
On
the
Automatic
load
lock mimic, click on
the
wafer
indicator. The
wafer
is
transferred
to
the
Automatic
load lock.
Recipe
page
Fig 5.14: Recipepage
The recipe
page
is
used
to
create,
edit
and run recipes.
See
sub-section 5.4.5
(Automatic
process run, page 5-16) and sub-section
5.5
(Creating and
editing
recipes, page 5-21).
The facilities
on
this page are:
Automatic
button
Select
to
carry
out
an
automatic
process run using a recipe. The
button's
indicator
is
coloured
yellow
when
selected.
The recipe
will
be
performed
on
a substrate. The substrate
will
start
at
the
normal
wafer
entry
point
and
will
be
automatically
transferred
to
each chamber,
as
the
recipe requires.
At
the
end
of
processing,
the
wafer
will
be
returned
to
its
starting
point.
Printed: 22-Mar-06, 10:42
Operating
Instructions
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of
52
UC
Davis 94-721001
Issue
1:
March 06
PlasmalabSystem100
Oxford
Instruments
Plasma
Technology
System Manual
Manual
button
Recipe
Name
field
Data
Log
Interval
field
Created
field
Recipe
length
field
Recipe step list
New
button
Load
button
Save
button
Run
button
Select
to
carry
out
a manual process run. The
button's
indicator
is
coloured
yellow
when
selected.
The recipe
is
associated
with
a chamber.
If
selected,
further
options
'wafer'
and
'no
wafer'
are given. No
automatic
wafer
transfers are
performed;
therefore
a
wafer
must be loaded using
the
Robot Control
page
if
required.
The
name
of
the
currently
loaded recipe.
Displays
the
data
log
interval, i.e.
the
time
interval
between
the
logging
of
system parameters.
The
date
and
time
of
recipe creation.
The
length
of
time
taken
to
run
the
recipe. This
is
the
sum
of
all
the
process times, excluding
wafer
transfer
time,
process stabilisation and
pumping
times.
A scrollable sequential list
of
steps contained in
the
recipe.
Select
to
create a
new
recipe.
Select
to
load an existing recipe.
Select
to
save
the
current
recipe.
Select
to
run
the
current
recipe. Be
aware
that
selecting
this
button
will
cause
the
robotic
arm,
slit
valve,
etc
to
operate!
Step
Library
Panel
Edit
button
Select
to
edit
the
selected
(highlighted)
recipe step.
New
button
Select
to
create a
new
recipe step.
Copy
button
Select
to
copy
the
selected recipe (you are
prompted
for
a
new
step
name).
Delete
button
Select
to
delete
the
selected
(highlighted)
recipe.
Step
Library
Displays
the
recipe steps available in a scrollable list.
list
UC
Davis 94-721001
Issue
1:
March 06
Operating
Instructions
Page 5-38
of
52
Printed: 22-Mar-06, 10:42
System
Manual
Oxford
Instruments
Plasma
Technology
PlasmalabSystem100
5.8.4
Production
mode
page
The
production
mode
page
is
automatically
displayed
when
a user logs
on
in
production
mode. To use
the
production
mode
facility,
refer
to
sub-section 5.4.7 (page 5-18).
Note
that
the
System
menu
button
can be used
to
select
the
pumping
option.
This provides
the
facility
of
evacuating and
venting
the
automatic
load lock.
Fig
5.15: Production mode
page
The facilities available on this page are:
Recipe
Name
field
Batch
Id
field
Created
field
Recipe
Length
field
Load
button
Run
button
The
name
of
the
currently
loaded recipe. The
indicator
at
the
right
of
this
field
is
coloured red
until
a recipe
is
loaded
when
it
changes
to
green.
Enter
the
batch
identity
of
the
currently
loaded
wafer.
The
indicator
at
the
right
of
this
field
is
coloured red
until
a batch
identity
is
entered
when
it
changes
to
green.
The
date
and
time
of
recipe creation.
The
length
of
time
taken
to
run
the
recipe.
Select
to
load an existing recipe.
Select
to
run
the
current
recipe. Be
aware
that
selecting
this
button
will
cause system
components,
e.g.
valves,
heaters,
etc.,
to
operate!
Note
that
this
button
only
becomes active
when
a
recipe has been loaded and a batch
identity
has been entered.
Printed: 22-Mar-06, 10:42
Operating
Instructions
Page 5-39
of
52
UC
Davis 94-721001
Issue
1:
March 06