Oxford-100-Manual.pdf - 第127页

System Manual Oxford Instruments Plasma Technology WARNING PlasmalabSystem 1 00 BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY. 6.5 94·100·3·41C ICP 180 chamber kit with gate valve WARNIN…

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PlasmalabSystem100
Oxford
Instruments Plasma Technology
WARNING
System
Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION
1·
HEALTH
AND
SAFETY.
The etch cleaning should be
performed
each
time
the
aggregate
of
the
deposition
layers
reaches
-10
microns.
The recommended clean process
is:
CFi02
8%
or
20%, 700mTorr, 200W,
;:::30
minutes
This process
is
optimised
for
rapid electrode cleaning.
If
it
is
found
that
the
cleaning rate
of
the
chamber walls
is
too
slow
with
the
above process,
then
a
low
pressure process can also be
used:
CF
4
/0
2
8%
or
20%, 350mTorr, 200W,
;:::
30minutes
The
two
processes can be
alternated
until
the
chamber and electrodes are etched clean.
A chamber
conditioning
step (using
the
normal
deposition
conditions in
the
empty
chamber
to
deposit
0.2-0.5IJm)
is
recommended
before
processing wafers.
UC
Davis 94-721001
Issue
1:
March 06
Maintenance
Page 6-8
of
22
Printed: 22-Mar-06,
7:41
System
Manual
Oxford
Instruments
Plasma
Technology
WARNING
PlasmalabSystem100
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
6.5
94·100·3·41C
ICP
180
chamber
kit
with
gate
valve
WARNING
BEFORE
ATTEMPTING
ANY
MAINTENANCE WORK ON THE
PROCESS
CHAMBER, IT
MUST
BE
SUBJECTED TO AT LEAST TWO VENT CYCLES SUBSEQUENT TO A
PROCESSING RUN.
6.5.1
6.5.2
Monthly
1)
Visually examine
the
interior
of
the
chamber
for
contamination.
Any
necessary
cleaning should be carried
out
using a
lint-free
cloth
moistened
with
Isopropyl
Alcohol
(lPA).
Tougher
deposits can be removed using an abrasive pad first.
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE).
DO
NOT
USE
IT
NEAR A NAKED FLAME
OR
ENERGISED ELECTRICAL EQUIPMENT.
Examine
the
exterior
of
the
chamber and its
fittings
for
damage.
Examine
the
lid and seals
for
any damage
or
deterioration.
Examine
the
heating/cooling
water
flow
system
for
signs
of
leakage.
Purge
the
process chamber
for
thirty
minutes
with
dry
nitrogen
if
IPA has been used
for
cleaning.
Visually examine
the
top
electrode
for
contamination.
Any
necessary cleaning should be
carried
out
using a
lint-free
cloth
moistened
with
Isopropyl Alcohol (lPA).
Examine
the
top
electrode and its
integral
gas and
water
fittings
for
damage.
Examine
the
seals
for
signs
of
deterioration.
O-rings
The O-rings should be checked
monthly
but
replaced
as
and
when
necessary.
Replacement O-rings should be constructed
of
Viton
and pre-baked
to
150°C
to
minimise
the
risk
of
water
vapour
from
the
O-rings. The chamber
lid
O-ring should
not
need
to
be removed
unless
it
leaks. Clean
the
O-ring in situ using a
lint-free
cloth
wetted
with
Isopropyl Alcohol.
To change
the
lid
O-ring
(use gloves):
1)
Remove
the
O-ring,
being
careful
not
to
damage
the
retaining
groove.
2)
Use
a
lint-free
cloth
and IPA
to
clean
the
O-ring sealing face on
the
chamber.
3)
The
new
O-ring, cleaned
with
IPA, should be inserted
with
no
twists. Stretch
the
0-
ring
evenly
as
it
is
inserted
to
avoid local regions
of
stretching.
Printed: 22-Mar-06,
7:41
Maintenance
Page 6-9
of
22
UC
Davis 94-721001
Issue
1:
March 06
PlasmalabSystem100
Oxford
Instruments
Plasma
Technology
WARNING
System Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
6.6
Top
electrode
WARNING
BEFORE ATTEMPTING
ANY
MAINTENANCE WORK
ON
THE
PROCESS
CHAMBER, IT
MUST
BE
SUBJECTED TO AT LEAST TWO VENT CYCLES SUBSEQUENT TO A
PROCESSING RUN.
6.6.1
6.6.2
6.6.3
Monthly
1)
Visually examine
the
top
electrode
for
contamination.
Any
necessary cleaning should
be carried
out
using a
lint-free
cloth moistened
with
Isopropyl Alcohol (IPA).
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT
USE
IT
NEAR A
NAKED
FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
2)
Examine
the
top
electrode and its
integral
gas
and
water
fittings
for
damage.
CarefUlly inspect gas
inlet
showerhead plates
for
signs
of
plasma
concentrating
in a
hole
and
enlarging
the
hole.
3)
Examine
the
seal
for
signs
of
incipient
deterioration.
Six-monthly
(tools
with
a
removable
showerhead)
Check
the
condition
of
the
gas
inlet
isolation assembly
for
any signs
of
brown
discoloration
of
the
white
PTFE.
(It goes
brown
sometimes
before
failing
with
a
major
enlargement
of
the
through-holes.)
Annually
(tools
having
access
to
the
gas
inlet
isolation
assembly
from
the
top
side
only)
Check
the
condition
of
the
gas
inlet
isolation assembly
for
any signs
of
brown
discoloration
of
the
white
PTFE.
(It goes
brown
sometimes
before
failing
with
a
major
enlargement
of
the
through-holes.)
UC
Davis 94-721001
Issue
1: March 06
Maintenance
Page 6-10
of
22
Printed: 22-Mar-06. 7:41