Oxford-100-Manual.pdf - 第130页

PlasmalabSystem 100 Oxford Instruments Plasma Technology WARNING System Manual BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1· HEALTH AND SAFETY. 6.8 6.8.1 94-100-6-S00/200V RIE SOOW RF generator / OIPT AMU …

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System
Manual
Oxford
Instruments
Plasma
Technology
WARNING
PlasmalabSystem100
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION
1·
HEALTH
AND
SAFETY.
6.7
94-100-S-12A
Cryo
He
lower
electrode
WARNING
BEFORE
ATTEMPTING
ANY
MAINTENANCE WORK ON
THE
PROCESS
CHAMBER,
IT
MUST
BE
SUBJECTED TO AT LEAST TWO VENT CYCLES SUBSEQUENT
TO
A
PROCESSING RUN.
6.7.1
Monthly
1)
Visually examine
the
substrate
table
for
contamination.
Any
necessary cleaning
should be carried
out
using a
lint-free
cloth
soaked in Isopropyl Alcohol (lPA).
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE).
DO
NOT
USE
IT
NEAR A NAKED FLAME
OR
ENERGISED ELECTRICAL EQUIPMENT.
Examine
the
table
and its
integral
heating
and/or
cooling
systems
for
signs
of
damage.
Printed: 22-Mar-06,
7:41
Maintenance
Page
6-11
of
22
UC
Davis 94-721001
Issue
1:
March 06
PlasmalabSystem
100
Oxford
Instruments Plasma Technology
WARNING
System Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE
WORK, READ SECTION
1·
HEALTH
AND
SAFETY.
6.8
6.8.1
94-100-6-S00/200V
RIE
SOOW
RF
generator
/ OIPT
AMU
kit
Three-monthly
Ensure
that
the
RF/microwave
radiation
leakage tests, detailed in
Appendix
A are carried out.
For details
of
maintenance required, refer
to
the
manufacturer's
literature
in Volume 3
of
this
manual.
UC
Davis 94-721001
Issue
1:
March 06
Maintenance
Page 6-12
of
22
Printed: 22-Mar-06,
7:41
System
Manual
Oxford
Instruments Plasma Technology
WARNING
PiasmaiabSystem100
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 • HEALTH
AND
SAFETY.
6.9
6.9.1
6.9.2
6.9.2.1
Vacuum
system
Active
Pirani
gauge
Refer
to
the
manufacturer's
literature
in
Volume
3
for
details
of
the
following
maintenance:
a)
Atmosphere
and vacuum
adjustment.
b) Filter cleaning.
Capacitance
manometer
Six-monthly
(or
as necessary)
1)
Remove
the
capacitance
manometer
from
the
process chamber.
WARNING
ISOPROPYL ALCOHOL
IS
HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT
USE
IT
NEAR A NAKED FLAME
OR
ENERGISED
ELECTRICAL
EQUIPMENT.
Carefully
pour
a measure
of
Isopropyl Alcohol (IPA)
at
room
temperature
into
the
pressure-measurement cavity. Do
not
allow
IPA
to
come
into
contact
with
electronic
components.
Agitate
the
solvent
carefully
and
then
pour
it
out.
CAUTION
Because
the
diaphragm
in
the
gauge
is
thin
tensioned
metal,
it
can
be
destroyed
by
sudden changes in
temperature
or
by
clumsy
handling.
Re-install
the
gauge,
allowing
sufficient
time
for
outgassing
of
the
cavity and
diaphragm
prior
to
operation.
NOTE:
Refer
to
the
manufacturer's
manual
for
calibration
adjustments.
6.9.3
Penning
gauge
The
following
applies
to
an Edwards Active Inverted
Magnetron
gauge.
If
a
different
Penning
gauge
is
fitted,
refer
to
the
manufacturer's
literature.
Printed: 22-Mar-06. 7:41
Maintenance
Page 6-13
of
22
UC
Davis 94-721001
Issue
1:
March 06