Oxford-100-Manual.pdf - 第172页
Plasma lab Oxford Instruments Plasma Technology System Manual 5 OIPT locations worldwide UK Oxford Instruments Plasma Technolgy North End, Yalton, Bristol, BS494AP Tel: +44(0)1934 837000 Fax: +44(0)1934837001 Email: plas…
System
Manual
NOTES:
Oxford
Instruments
Plasma
Technology
Plasmalab
Process
Information
(Information
contained
in
this
document
is
confidential)
Printed:
08
January
2006 09:37 Page 29
of
30
Issue
1: December 03
Plasma
lab
Oxford
Instruments
Plasma
Technology
System Manual
5 OIPT locations
worldwide
UK
Oxford Instruments Plasma Technolgy
North End, Yalton,
Bristol,
BS494AP
Tel: +44(0)1934 837000
Fax: +44(0)1934837001
Email: plasma.technology@oxinsl.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A Baker Avenue Extension
Concord, MA 01742
Tel:
+1
9783699933
Toll Free
+1
800-447-4717
Fax:
+1
978 369 8287
Email: info@ma.oxinsl.com
Germany
Oxford Instruments GmbH
Olto-von-Guericke Ring 10,
0-65205 Wiesbaden
Tel: +49(0)6122 937161
Fax: +49(0)6122937175
Email: plasma@oxford.de
Japan
Oxford Instruments K.K.
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email: oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People's
Republic
of
China
(Beijing)
Oxford Instruments China
Room 714, Office Tower
3,
Henderson Center,
No. 18 Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86
1065188160/1/2
Fax: +86 1065188155
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
People's
Republic
of
China
(Shanghai)
Oxford Instruments China
Room 14-F,
NO.1
Plaza
800 Nanjing East Road
Shanghai 200001
Tel:
+862163608530
Fax:
+862163608535
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte.
Ltd
371
Beach Road,
#02-07 Keypoint
Singapore 199597
Tel: +65 6337 6848
Fax: +65 6337 6286
Email: oipl.sales@oxford-
instruments.com.s9
Taiwan
Oxford Instruments Overseas
Marketing Ltd.
1
F,
No
23
Jing-Shang 19
1h
Street,
Hsinchu, Taiwan
Tel:
+6563376848
Fax: +65 6337 6286
Email: oipl.sales@oxford-
instruments.com.sg
Process
Information
(Information
contained
in
this
document
is
confidential)
Issue
1: December 03 Page 30
of
30 Printed: 08 January 2006 09:37
System
Manual
Oxford
Instruments
Plasma
Technology
WARNING
Plasma
lab
and
lonfab
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
8.
Uninstallation
and
Disposal
8.
Uninstallation
and
Disposal 8-1
8.1
About
this section
8-2
8.2
Uninstalling
the
system 8-2
8.2.1 General considerations
for
shutting
the
system
down
8-2
8.2.2
Shutting
the
system
down
8-2
8.2.3 Disconnecting
the
services 8-3
8.2.4
Decontamination
8-4
8.2.5 Dismantling
the
system components 8-4
8.3
Disposal 8-5
Printed: 25-May-05, 10:18
Uninstallation and Disposal
Page
8-1
of
6
Issue
1: February 00