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Plasma lab and lonfab Oxford Instruments Plasma Technology WARNING System Manual BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY. 13) Disconnect the extraction collars on the process chamb…

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System
Manual
Oxford
Instruments
Plasma Technology
WARNING
Plasma
lab
and
lonfab
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION
1·
HEALTH
AND
SAFETY.
Systems
without
turbomolecular
pumps:
4)
Pump
the
system
for
one
hour
with
a small N
z
flow,
then
pump
for
a
further
hour
with
no
gas
flow.
5)
The process chamber, load lock and
transfer
chamber
(if
applicable) should be
vented
with
dry
nitrogen
and
the
process gas
inlet
blanked.
6)
Ensure
that
the
system has been
shut
down
in accordance
with
the
procedure given
in Section 5 (Operating Instructions) and
Appendix
B
(Operation
and
Maintenance
of
Turbomolecular
Pumps).
7)
Depending on system type, ensure
that
the
front
panel compressed
air
lockout
valves are set
to
their
OFF
positions and padlocked. (e.g. slit valves,
gate
valves,
RGA,
etc.
if
fitted)
8.2.3
Disconnecting
the
services
IMPORTANT:
BEFORE
DISCONNECTING
ANY
OF
THE
SERVICES, ENSURE THAT THEY
ARE
TURNED
OFF.
E.G. COMPRESSED AIR
AND
GAS SUPPLY VALVES
SET
TO THEIR
OFF
POSITIONS
AND
ELECTRICAL SUPPLIES SWITCHED
OFF
AND
LOCKED OUT.
1)
Ensure
that
all covers and panels are
fitted
and
attach
notices
to
the
system
indicating
that
the
system
is
not
ready
for
service.
2)
Disconnect
the
electrical supply
from
the
PC.
3)
Disconnect
the
electrical supply
from
the
safety isolation box
to
the
system console.
4)
At
the
system
PC,
disconnect
the
monitor,
keyboard and mouse,
then
disconnect
the
control
cable(s)
from
the
PC
to
the
system console.
5)
Disconnect
the
safety
earth
(ground)
between
the
system and
the
gas pod,
if
the
gas
pod
is
not
bonded
to
the
system.
6)
Disconnect
the
cooling
circuits
from
the
system console.
Coolant
may be removed,
if
so
wished
by
using
low
pressure « 1 bar gauge) compressed air. Do
not
seal
the
cooling
circuits
tightly.
7)
Disconnect
the
gas
outlet
line(s) and
control
cable
from
the
gas
pod
to
the
system
services panel.
8)
Disconnect
the
gas supplies
to
the
gas
pod
(all gas supply valves closed).
9)
Disconnect
the
compressed air supply
from
the
system services panel(s) and
from
the
gas pod.
10) Disconnect
the
Nitrogen
purge
lines
to
the
system services panel(s) and
the
rotary
vane pump(s).
11) Disconnect
the
rotary
pump(s)
from
the
system and cap
the
pump
ports and
the
system vacuum ports.
12) Disconnect
the
rotary
vane
pump
exhaust line.
Printed: 25-May-05, 10:18
Uninstallation
and Disposal
Page 8-3
of
6
Issue
1:
February 00
Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
WARNING
System Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
13) Disconnect
the
extraction
collars
on
the
process chamber(s) (e.g.
ICP
process
chambers) and
the
gas
pod
from
the
extraction
systems.
8.2.4
8.2.5
Decontamination
Remove any hazardous residues/deposits
from
the
process chamber,
ion
sources, pumps and
pump
lines, gas lines and
mass
flow
controllers in accordance
with
local safety regulations.
Refer
to
equipment
manufacturer's
manuals
as
necessary.
Note
that
if
the
system
is
to
be
moved
and re-installed,
it
may be acceptable
to
purge
the
gas
lines /
mass
flow
controllers and
ion
sources
(if
fitted)
with
dry
nitrogen
and seal all
connections.
Dismantling
the
system
components
WARNING
LIFTING HEAVY
OBJECTS
INCORRECTLY CAN CAUSE SEVERE INJURY
When
handling
heavy
system
components
such as
the
system
unit
or
vacuum
pumps,
ensure
that
the
appropriate
lifting
equipment,
operated
by
fully
trained
personnel,
is
used.
When
heavy
rack-mounted
components
are
handled,
ensure
that
the
weight
is
safely
distributed
between
sufficient
personnel.
WARNING
TOPPLING (TIPOVER) HAZARD - SOME SYSTEM COMPONENTS, E.G. ROBOTIC HANDLERS
AND
AUTOMATIC LOAD LOCKS I TRANSFER CHAMBERS (ESPECIALLY
IF
FITTED WITH
CASSETTE
LOAD LOCKS) CAN
TOPPLE
CAUSING SEVERE INJURY.
When
transporting
or
manoeuvring
the
system
frames,
robotic
handlers
etc.,
ensure
that
they
remain
vertical
at
all
times
and
use
the
appropriate
lifting
I
handling
equipment.
Ensure
that
any
support
frames,
supplied
with
the
system,
are
correctly
fitted
whenever
the
system
is
transported
I
manoeuvred
or
dismantled
for
service I
maintenance.
It
is
entirely
the
user's
responsibility
to
ensure
that
all
components
are
supported
safely
before
and
during
any
transporting,
manoeuvring
or
maintenance
operations.
Support
frames
prOVided
by
Oxford
Instruments
Plasma
Technology
are
not
necessarily
adequate
for
any
such
operations.
The absence
of
a
support
frame
must
not
be
taken
as
an
indication
that
no
further
precautions
need
to
be
made
before
such
operations
are
undertaken.
1)
In
the
grey area, remove
the
rotary
vane
pump
from
its
mounting
and prepare
it
for
transport
in accordance
with
the
pump
manufacturer's
instructions. Refer
to
the
manufacturer's
literature
in
Volume
3
of
this manual.
2)
Remove
the
gas
pod
from
its
mounting
and prepare
it
for
transport.
3)
Prepare
the
system
PC
for
transport.
Issue
1:
February 00
Uninstallation
and Disposal
Page 8-4
of
6 Printed: 25-May-05. 10:18
System
Manual
Oxford
Instruments Plasma Technology
WARNING
Plasma
lab
and
lonfab
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION
1·
HEALTH
AND
SAFETY.
4)
Prepare
the
system frames
for
transport
by
disconnecting processing modules
from
the
transfer
chamber
(if
applicable) and
fitting
the
castor assemblies.
8.3
Disposal
This sub-section gives gUidance
for
disposing
of
the
system
at
the
end
of
its life. The disposal
must be carried
out
in accordance
with
local safety regulations.
To dispose
the
system, use
the
following
procedure:
1)
Carry
out
the
uninstallation
procedure given
in
sub-section 8.2, page 8-2
2)
Locate, remove and dispose
of
any hazardous materials
in
accordance
with
local
safety regulations, e.g. batteries, o-rings, oil etc. Refer
to
manufacturer's
manuals.
3)
Dispose
of
the
remainder
of
the
system in accordance
with
local safety regulations.
Printed: 25-May-05, 10:18
Uninstallation
and Disposal
Page 8-5
of
6 Issue
1:
February 00