Oxford-100-Manual.pdf - 第178页

Plasma lab and lonfab Oxford Instruments Plasma Technology WARNING System Manual BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY. NOTES: Issue 1: February 00 Uninstallation and Disposal Pa…

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System
Manual
Oxford
Instruments Plasma Technology
WARNING
Plasma
lab
and
lonfab
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION
1·
HEALTH
AND
SAFETY.
4)
Prepare
the
system frames
for
transport
by
disconnecting processing modules
from
the
transfer
chamber
(if
applicable) and
fitting
the
castor assemblies.
8.3
Disposal
This sub-section gives gUidance
for
disposing
of
the
system
at
the
end
of
its life. The disposal
must be carried
out
in accordance
with
local safety regulations.
To dispose
the
system, use
the
following
procedure:
1)
Carry
out
the
uninstallation
procedure given
in
sub-section 8.2, page 8-2
2)
Locate, remove and dispose
of
any hazardous materials
in
accordance
with
local
safety regulations, e.g. batteries, o-rings, oil etc. Refer
to
manufacturer's
manuals.
3)
Dispose
of
the
remainder
of
the
system in accordance
with
local safety regulations.
Printed: 25-May-05, 10:18
Uninstallation
and Disposal
Page 8-5
of
6 Issue
1:
February 00
Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
WARNING
System Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
NOTES:
Issue
1:
February 00
Uninstallation and Disposal
Page 8-6
of
6
Printed: 25-May-05, 10:18
System Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
Appendix
A
Measurement
of
radio
frequency
and
microwave
emissions
1.
Scope
of
testing
2
2.
Method
of
testing
2
3.
Acceptable
exposure
standards
3
4.
System
design
3
Printed: 21-Dec-04, 13:43
Measurement
of
RF
& Microwave Emissions
Page
1
of
4
Issue
2:
December
01