Oxford-100-Manual.pdf - 第179页

System Manual Oxford Instruments Plasma Technology Plasma lab and lonfab Appendix A Measurement of radio frequency and microwave emissions 1. Scope of testing 2 2. Method of testing 2 3. Acceptable exposure standards 3 4…

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Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
WARNING
System Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
NOTES:
Issue
1:
February 00
Uninstallation and Disposal
Page 8-6
of
6
Printed: 25-May-05, 10:18
System Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
Appendix
A
Measurement
of
radio
frequency
and
microwave
emissions
1.
Scope
of
testing
2
2.
Method
of
testing
2
3.
Acceptable
exposure
standards
3
4.
System
design
3
Printed: 21-Dec-04, 13:43
Measurement
of
RF
& Microwave Emissions
Page
1
of
4
Issue
2:
December
01
Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
WARNING
System
Manual
THIS APPENDIX COVERS ALL
OF
THE CURRENT REQUIREMENTS
FOR THE MEASUREMENT
OF
RADIO
FREQUENCY
AND
MICROWAVE
EMISSIONS FOR THE OXFORD INSTRUMENTS
PLASMA
TECHNOLOGY'S RANGE
OF
PRODUCTS. ENSURE THAT
THE ENTIRE APPENDIX IS READ
AND
UNDERSTOOD BY ALL
INVOLVED PERSONNEL
AND
THAT THE
TESTS
RELEVANT TO THE
INSTALLED SYSTEM ARE CARRIED OUT AT THE SPECIFIED
PERIODICITY.
1. Scope
of
testing
Systems
which
contain
RF
generators,
both
Ion Beam and Plasma systems
will
be tested
for
the
emission
of
energy
prior
to
shipment. They
will
also
be
tested
routinely
every
three
months
during
use,
or
as
required
by
safety standards
at
the
customer's site,
if
this
is
more
frequent.
Systems must also
be
tested
after
maintenance,
if
the
maintenance has involved
RF
shielding components
such
as
covers and viewports,
or
components in
the
process chamber such
as
feedthroughs
and vacuum
gauges.
Systems
with
RF
generators
in
the
frequency range
of
0.1
MHz
to
27
.12
MHz
must be tested
for
emissions
by measuring separately
both
the
electric
(E)
and
magnetic
(H)
field
strengths. Either
field
can be a safety
hazard, hence
the
need
to
test
both.
Systems
with
microwave frequency generators
at
2.45 GHz
will
only
be
tested
for
power, usually by
measuring
the
electric
(E)
field.
2.
Method
of
testing
Suitable
test
meters are
the
Narda
1
8511
for
1.7MHz
to
2.1MHz,
the
Narda 8512
for
13.56
MHz
and 27.12
MHz, and
the
Holad
ay
21501
for
2.45 GHz. Equivalent meters
from
other
vendors are acceptable. The test
meter
MUST have a
current
calibration
certificate.
Note
that
if
an
alternative
13.56
MHz
meter
is
used,
it
should be able
to
detect
the
presence
of
27.12
MHz
as
well
as
13.56 MHz.
Testing
must
be
performed
on
the
system in its
normal
operating
configuration,
with
the
usual covers and
components
in
place. The system
must
be
operating
at
maximum
reasonable power, and must be tested
both
in
the
presence and
the
absence
of
plasma.
The
field
strength
must
be measured 50
mm
(2
inches)
away
from
the
system,
at
all points
that
can be
reached by
hand
with
the
probe
(If
parts
of
the
system are inaccessible
from
the
ground,
a stepladder
must be used). The probes
of
the
above meters are designed
so
that
the
correct distance
is
obtained
if
the
head
of
the
probe
is
touching
the
system.
Particular
attention
must
be
given
to
viewports, doors and flanges,
the
automatch
unit,
and
the
whole
length
of
waveguides and
RF
power
cables.
If
viewports
are
fitted
with
shutters,
then
tests must be made
with
the
shutter
both
open
and shut.
All
cables leaving gauges and
other
feedthroughs
in
the
process
chamber and
the
pumping
system are suspect, and must be checked
along
their
entire
length. The
pumping
system and any separate system racks and
power
box
must
also
be
checked.
1The Narda
Microwave
Corporation,
Plainview,
New
York
11803.
2Holaday Industries Inc, 14825
Martin
Drive, Eden Prairie,
MN
55344.
Issue
2:
December
01
Measurement
of
RF
&
Microwave
Emissions
Page 2
of
4
Printed: 21-Dec-04, 13:43