Oxford-100-Manual.pdf - 第187页
System Manual Appendix C Oxford Instruments Plasma Technology Concessions Plasma lab and lonfab Appendix C Concessions 1 1.1 General 2 Printed: 23-Jul-05. 10:23 Concessions Page 1 of 2 Issue 1: June 02
Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
System
Manual
Note
that
the
grease syringe has a
limited
shelf
life
so
shouldn't
be ordered
from
the
Alcatel service
centre
until
it
is
needed. Alcatel exercises
strict
stock
control
on this
item
to
ensure
that
the
grease
is
always in
good
condition.
Once
the
grease has been
applied
to
the
bearing,
it
needs
to
be
evenly
distributed
around
the
bearing.
This
is
done
automatically
by
using
the
ACT
controller's
'RUNNING IN' menu.
Note
that
the
grease
distribution
takes
approximately
2.5
hours.
Issue
3:
June 02
Operation
and
Maintenance
of
Turbo
Pumps
Page 4
of
4
Printed: 21-Dec-04. 13:44
System
Manual
Appendix
C
Oxford
Instruments
Plasma
Technology
Concessions
Plasma
lab
and
lonfab
Appendix
C Concessions 1
1.1
General 2
Printed: 23-Jul-05. 10:23
Concessions
Page 1
of
2
Issue
1:
June 02
Plasma
lab
and
lonfab
1.1
General
Oxford
Instruments
Plasma
Technology
System
Manual
A Concession
is
a
Quality
Assurance
form
(QCF27
Engineering Concession)
that
gives details
of
a
modification
applicable
to
this
Plasma
lab
or
lonfab
system.
Each
concession
is
referenced
with
a
unique
serial number.
This Section contains a copy
of
the
concessions
(if
any) applicable
to
this system,
for
the
Customer's
reference.
If
there
are any applicable concessions,
they
will
be located
immediately
after
this Section (Appendix
C),
or
published
as
a standalone
.pdf
file
in
the
same
folder
as
this manual.
Issue
1:
June 02
Concessions
Page 2
of
2 Printed: 23-Jul-05, 10:23