Oxford-100-Manual.pdf - 第197页
, , II/Iodular CIUs~er sys~em - ICP 180
Plasma
lab
and
lonfab
NOTES:
Issue
1:
March 04
Oxford
Instruments
Plasma
Technology
Restoring a Hard Drive
Page 8
of
8
System Manual
Printed: 24-Feb-05, 8:50
,
,
II/Iodular
CIUs~er
sys~em
- ICP
180
PlasmalabSystem
100
Oxford
Instruments
Plasma Technology
Installation Data
Change
record
sheet
Issue
No.
Details
of
chanCie
Date
4 Change Record sheet added. Service space
note
added
to
1 November 04
Fi~
1,
Fi~
2 &
Fi~
3.
5 Sub-section 5.2 -
cooling
water
connector sizes changed.
1 June 05
Fi~
4 updated.
Issue
5:
June 05
Installation Data
(ICP
180)
Page 2
of
18
Printed: 22-Mar-06, 6:57