Oxford-100-Manual.pdf - 第198页

PlasmalabSystem 100 Oxford Instruments Plasma Technology Installation Data Change record sheet Issue No. Details of chanCie Date 4 Change Record sheet added. Service space note added to 1 November 04 Fi~ 1, Fi~ 2 & F…

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CIUs~er
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- ICP
180
PlasmalabSystem
100
Oxford
Instruments
Plasma Technology
Installation Data
Change
record
sheet
Issue
No.
Details
of
chanCie
Date
4 Change Record sheet added. Service space
note
added
to
1 November 04
Fi~
1,
Fi~
2 &
Fi~
3.
5 Sub-section 5.2 -
cooling
water
connector sizes changed.
1 June 05
Fi~
4 updated.
Issue
5:
June 05
Installation Data
(ICP
180)
Page 2
of
18
Printed: 22-Mar-06, 6:57
Installation Data
Oxford
Instruments
Plasma
Technology
PlasmalabSystem
100
Contents
Page
Change
record
sheet
2
1.
Introduction
4
2.
Installation
information
5
2.1 Dimensions 5
2.2
Weights
5
2.3
Heat
load 5
3. Services
connections
9
4. Gas
handling
11
5. Services
14
5.1 Electrical Supply
requirement
14
5.2
Water
Cooling
requirement
14
5.3
Lower
Electrode Cooling
requirement
14
5.4
Compressed
Air
requirement
14
5.5
Nitrogen
requirement
15
5.6
Process gas
requirement
15
5.7
Helium
requirement
15
5.8
Extraction
requirement
15
6.
Pump
set
information
16
6.1 Rotary
pump
purging
16
7.
Heater/chiller
information
16
8.
Interlocks
17
9. OIPT
locations
worldwide
18
Fig
1:
ICP
180 system
layout
(3-frame) 6
Fig
2:
ICP
180 system
layout
(3-frame cluster upgradeable) 7
Fig
3:
ICP
180 Layout (2-frame cluster upgradeable) 8
Fig
4:
ICP
180 services panel 9
Fig
5:
Electrical connections 10
Fig
6:
6-line gas
pod
11
Fig
7:
6-line gas
pod
mounted
on
optional
free-standing
frame
12
Fig
8:
12-line gas
pod
13
Printed: 22-Mar-06, 6:57
Installation Data
(ICP
180)
Page 3
of
18
Issue
5:
June 05