Oxford-100-Manual.pdf - 第199页

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem 1 00 Contents Page Change record sheet 2 1. Introduction 4 2. Installation information 5 2.1 Dimensions 5 2.2 Weights 5 2.3 Heat load 5 3. Services c…

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PlasmalabSystem
100
Oxford
Instruments
Plasma Technology
Installation Data
Change
record
sheet
Issue
No.
Details
of
chanCie
Date
4 Change Record sheet added. Service space
note
added
to
1 November 04
Fi~
1,
Fi~
2 &
Fi~
3.
5 Sub-section 5.2 -
cooling
water
connector sizes changed.
1 June 05
Fi~
4 updated.
Issue
5:
June 05
Installation Data
(ICP
180)
Page 2
of
18
Printed: 22-Mar-06, 6:57
Installation Data
Oxford
Instruments
Plasma
Technology
PlasmalabSystem
100
Contents
Page
Change
record
sheet
2
1.
Introduction
4
2.
Installation
information
5
2.1 Dimensions 5
2.2
Weights
5
2.3
Heat
load 5
3. Services
connections
9
4. Gas
handling
11
5. Services
14
5.1 Electrical Supply
requirement
14
5.2
Water
Cooling
requirement
14
5.3
Lower
Electrode Cooling
requirement
14
5.4
Compressed
Air
requirement
14
5.5
Nitrogen
requirement
15
5.6
Process gas
requirement
15
5.7
Helium
requirement
15
5.8
Extraction
requirement
15
6.
Pump
set
information
16
6.1 Rotary
pump
purging
16
7.
Heater/chiller
information
16
8.
Interlocks
17
9. OIPT
locations
worldwide
18
Fig
1:
ICP
180 system
layout
(3-frame) 6
Fig
2:
ICP
180 system
layout
(3-frame cluster upgradeable) 7
Fig
3:
ICP
180 Layout (2-frame cluster upgradeable) 8
Fig
4:
ICP
180 services panel 9
Fig
5:
Electrical connections 10
Fig
6:
6-line gas
pod
11
Fig
7:
6-line gas
pod
mounted
on
optional
free-standing
frame
12
Fig
8:
12-line gas
pod
13
Printed: 22-Mar-06, 6:57
Installation Data
(ICP
180)
Page 3
of
18
Issue
5:
June 05
PiasmaiabSystem100
Oxford
Instruments
Plasma Technology
Installation Data
1.
Introduction
This
installation
specification
document
gives
information
about
the
PlasmalabSystem100
to
enable
customers
to
prepare
the
required
environment
for
the
system.
Note
that
all dimensions shown
in
these data sheets are typical; precise dimensions depend
on
the
actual
equipment
fit.
All
dimensions are given in
millimetres
unless
otherwise
stated.
NOTE:
All
information,
services, dimensions etc.,
refer
only
to
the
PlasmalabSystem100, i.e. plasma processing
at
up
to
200
mm
wafers in
MESC
compatible
chambers.
Oxford
Instruments Plasma Technology conducts a
programme
of
continual
product
development,
and reserves
the
right
to
change
the
design
and/or
specification
of
equipment
without
notice. The details
contained
in this
document
were
correct
at
the
time
of
printing
but
should be
confirmed
immediately
prior
to
delivery. Details
of
the
clean
room
interface
will
be
advised
at
the
time
of
delivery.
Issue
5:
June 05
Installation Data
(lCP
180)
Page 4
of
18 Printed: 22-Mar-06. 6:57