Oxford-100-Manual.pdf - 第201页

Installation Data Oxford Instruments Plasma Technology PlasmalabSystem 1 00 2. Installation information 2.1 Dimensions System dimensions are given in Fig 1, Fig 2 and Fig 3. Gas handling component dimensions are given in…

100%1 / 362
PiasmaiabSystem100
Oxford
Instruments
Plasma Technology
Installation Data
1.
Introduction
This
installation
specification
document
gives
information
about
the
PlasmalabSystem100
to
enable
customers
to
prepare
the
required
environment
for
the
system.
Note
that
all dimensions shown
in
these data sheets are typical; precise dimensions depend
on
the
actual
equipment
fit.
All
dimensions are given in
millimetres
unless
otherwise
stated.
NOTE:
All
information,
services, dimensions etc.,
refer
only
to
the
PlasmalabSystem100, i.e. plasma processing
at
up
to
200
mm
wafers in
MESC
compatible
chambers.
Oxford
Instruments Plasma Technology conducts a
programme
of
continual
product
development,
and reserves
the
right
to
change
the
design
and/or
specification
of
equipment
without
notice. The details
contained
in this
document
were
correct
at
the
time
of
printing
but
should be
confirmed
immediately
prior
to
delivery. Details
of
the
clean
room
interface
will
be
advised
at
the
time
of
delivery.
Issue
5:
June 05
Installation Data
(lCP
180)
Page 4
of
18 Printed: 22-Mar-06. 6:57
Installation Data
Oxford
Instruments
Plasma Technology
PlasmalabSystem100
2.
Installation
information
2.1
Dimensions
System dimensions are given in Fig
1,
Fig 2 and Fig
3.
Gas
handling
component
dimensions are
given in Fig
6,
Fig 7 and Fig
8.
Pump dimensions are given in Section
6.
Heater/chiller
dimensions are given
in
Section 7.
2.2
Weights
Typical
weights
of
system components:
2-frame system: 320 kg
3-frame
system: 390 kg
6-line
Gas
pod:
35
kg
12-line
Gas
pod:
65
kg
Pumps:
See
Section 6 (Pump set
information).
Heater/chillers:
See
Section 7 (Heater/chiller
information).
2.3
Heat
load
The typical
heat
load
for
the
clean
room
installation
is:
Operating:
Passive:
2kW
1.5
kW
Note
that
these specifications
do
not
include
externally
sited components, e.g. pumps,
heater/chillers, transformers, etc
..
Printed: 22-Mar-06. 6:57
Installation Data
(ICP
180)
Page 5
of
18
Issue
5:
June 05
PlasmalabSystem
100
Oxford
Instruments
Plasma
Technology
Installation Data
1630
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS
ALLOWED
BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS,
E.G.
THE POWER
DISTRIBUTION UNIT.
55
D~
0
0
747
()
-.;
""
.......
"
I I
n
0
-
'-
D
II
IQI
uilil
II
1111
00
0
00
00
00
0
~~o
0
o 0
L--
t----
-
..
...
..
-
..
I I
c::
p
0
2
1516
f---
f---
..
159
Fig
1:
lCP
180 system layout (3-frame)
NOTE: For services panel details,
see
~
Issue
5:
June 05
Installation Data
OCP
180)
Page 6
of
18 Printed: 22-Mar-06, 6:57