Oxford-100-Manual.pdf - 第213页
Installation Data Oxford Instruments Plasma Technology PlasmalabSystem 100 8. Interlocks There are two types of interlocks used on the PlasmalabSystem 100; hardware and software. In all areas, the hardware interlock will…
PlasmalabSystem100
Oxford
Instruments
Plasma Technology
Installation Data
6.
Pump
set
information
CAUTION
Where
the
rotary
vane
or
Roots
pumps
are
powered
from
a
mains
supply
separate
from
the
PiasmaiabSystem1 00, a
separate
'emergency
off'
facility
must
be
provided
by
the
customer.
Available
Length
Width
Height
Machine
*Pump
Weight
Power
MinimumN
z
pump
options
mm mm
mm
connection
outlet
kg
consumption
purge
rate
connection
kW
Alcatel 2015C2
462 188 240
NW25
NW25
27
0.45 (50Hz)
2 litres/minute
0.55 (60Hz)
Alcatel 2033C2
701
213 348
ON
40
ON
40 76
1.1
(50Hz) 2 litres/minute
1.3 (60Hz)
Alcatel 2063C2
819 264 397
ON
40
ON
40
98
2.2 (50Hz) 2 litres/minute
2.6 (60Hz)
Alcatel
AOP
830 390 580
ON
50
ON
40 245 1.5
10
Iitreslminute
122P
Alcatel
830 390 580
ON
100
ON
40 378 1.8 (50Hz) 10 Iitres/minute
AOS602P
2.0 (60Hz)
Alcatel
ACP
609 185 310
ON
25
ISO
K-F
33.5 1.2 1.05
28G
Iitres/minute
Alcatel
RSV
301
880 510 1000
ON
40
ON
63
220 1.1 (50/60Hz) *
*2
litres/minute
*
All
fittings
and
pipework
connected
to
the
rotary
pump
exhaust
must
be made
from
industry standard stainless steel.
Refer
to
the
OIPT
Services Specifications document, sub-section 8.1.
** This
fiqure
applies
only
to
the
rotary
vane pump;
the
roots
blower
does
not
require
N?
purqinq.
6.1
Rotary
pump
purging
The requirements
for
rotary
pump
purging
depend on
the
process used. Customers should
consult
the
pump
manufacturer
for
their
recommendations.
For Alcatel 2033 and 2063
rotary
pumps,
the
recommended
minimum
N
z
purge
rate
is
2
litres/minute
at
a pressure
of
2bar
to
5bar. For
highly
corrosive
or
pyrophoric
gases,
4
litres/minute
is
recommended.
7.
Heater/chiller
information
Available
Length
Width
Height
*Typical
Water
Weight
Electrical
heater/chiller
mm mm mm
operational
connections
kg
requirements
options
temperature
range
Neslab
RTE-7
445
235 600
O°C
to
+90°C
%"
Swagelok 28.6
230V 50Hz
or
115V
fitted
60Hz, 12A single
phase
Betta-Tech
610 380
450 -10°C
to
+70°C
%"
Swagelok 62
240V 50Hz 8.5A
or
CU500
fitted
110V 60Hz 15A,
sinqle phase
*Standard
control
ranqe,
for
other
temperature
ranqes please consult
the
factory.
IMPORTANT: Heater/chillers should
be
filled/topped
up
with
Hexid
A40
coolant
(Oxford
Plasma
Technology
Part
No.
GIWTRlSUN/007
for
15
litres). This
product
is
propylene
glycol based
and
is
pre-diluted
ready
for
use.
Refer
the
OIPT 'Services Specifications
for
Plasmalab
and
lonfab
systems'
document,
sub-section 2.1
for
the
warranty
impact
of
not
using
this
product.
Issue
5:
June
05
Installation Data
(ICP
180)
Page 16
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18
Printed: 22-Mar·06, 6:57
Installation Data
Oxford
Instruments
Plasma
Technology
PlasmalabSystem100
8.
Interlocks
There are
two
types
of
interlocks used
on
the
PlasmalabSystem100;
hardware
and software.
In all areas,
the
hardware
interlock
will
override
any
software
interlock. The
hardware
interlocks, and
their
effect
on
the
system components in
the
case
of
an
interlock
becoming
open
circuit
are
as
follows:
The electrical interlocks are
divided
into
two
circuits
controlling
the
power
to
the
system.
1)
The mains
power
connection
is
made
to
a system Power
Distribution
Unit. The Power
Distribution
Unit
will
disable all
of
its
power
outputs
under
the
following
conditions:
a)
If
the
Emergency
Off
button
is
pressed.
b)
Ifthere
is
an
interruption
of
the
power
input
to
the
system.
c)
If
the
Power
Distribution
Unit
external
facility
interlock
sensor
link
becomes
open
circuit.
NOTE:
The Power
Distribution
Unit
external
facility
interlock
sensor
link
enables
the
interlocks
of
external sensors, e.g. gas
detectors, exhaust scrubbers, etc.,
to
be
monitored
by
the
Power
Distribution
Unit. External
interlock
contacts connected
to
this
link
should be
voltage
free
and Normally Closed, i.e.
faulting
to
an Open Circuit.
2)
The system
internal
24V supply, comprises a process line and a chamber line:
The 24V process line,
which
controls
the
process gases and plasma
power
supply
units,
will
be
disabled
under
the
following
conditions:
a)
If
the
Vacuum Safety Switch
is
open circuit, i.e. Chamber Pressure> 600
mbar.
b)
If
the
load lock slitvalve
is
OPEN.
The 24V chamber
line
will
be disabled
under
the
following
conditions, leaving
the
system
controller
operational,
but
disabling all system components:
a)
If
the
Water
Flow
switch
is
not
closed.
b)
If
the
Chamber
top
is
OPEN.
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Installation Data
(lCP
180)
Page 17
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18
Issue
5:
June 05
PlasmalabSystem100
Oxford
Instruments
Plasma
Technology
Installation Data
Emergency
Off
I Electrical
24V
Process
line
24V
Chamber
line
Fail
Interlock
Fail
Restore
Fail
Restore
Fail Restore
System/Controller
OFF
Restart
Required
ON ON
RF
Generator
OFF
Powered, NOT
OFF
Powered,
OFF
Powered,
active
NOT active
NOT active
Process
Gases
OFF
Powered, NOT
OFF
Powered,
OFF
Powered,
active
NOT active
NOT active
Automatic
Pressure
CLOSED CLOSED
NO NO
CLOSED
CLOSED
Controller
Valve CHANGE CHANGE
Load lock
Slit Valve
HOLD HOLD
HOLD HOLD HOLD HOLD
Pumps
OFF
Pumps must be NO NO
OFF
Pumps must
restarted
CHANGE
CHANGE
be restarted
Table
2 • Consequences
of
open
circuit
interlocks
The
other
component
specific interlocks are
incorporated
into
the
software
controller,
alerting
the
operator
of
conditions such
as
low
process gas
flow,
pump
failure, etc. The
software
also
monitors
the
position
of
the
wafer
handling
mechanisms, ensuring safe
operation.
9. OIPT locations
worldwide
UK
Oxford Instruments Plasma Technolgy
North End, Yalton,
Bristol,
BS494AP
Tel: +44(0)1934 837000
Fax: +44(0)1934837001
Email: plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A Baker Avenue Extension
Concord, MA 01742
Tel:
+1
9783699933
Toll Free +1800-447-4717
Fax:
+1
9783698287
Email: info@ma.oxinst.com
Germany
Oxford Instruments GmbH
Olto-von-Guericke Ring 10,
0-65205 Wiesbaden
Tel: +49(0)6122 937161
Fax: +49(0)6122937175
Email: plasma@oxford.de
Issue
5:
June 05
Japan
Oxford Instruments
K.K.
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email: oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People's
Republic
of
China (Beijing)
Oxford Instruments China
Room 714, Office Tower
3,
Henderson Center,
No. 18 Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86 1065188160/1/2
Fax: +86 1065188155
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Installation Data
(ICP
180)
Page 18
of
18
People'S
Republic
of
China
(Shanghai)
Oxford Instruments China
Room 14-F,
No.1
Plaza
800 Nanjing East Road
Shanghai 200001
Tel:
+862163608530
Fax:
+862163608535
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte.
Ltd
371
Beach Road,
#02-07 Keypoint
Singapore 199597
Tel: +65 6337 6848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.sg
Taiwan
Oxford Instruments Overseas
Marketing Ltd.
1
F,
No 23 Jing-Shang 19
'h
Street,
Hsinchu, Taiwan
Tel: +65 6337 6848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.sg
Printed: 22-Mar-06. 6:57