Oxford-100-Manual.pdf - 第214页

PlasmalabSystem 100 Oxford Instruments Plasma Technology Installation Data Emergency Off I Electrical 24V Process line 24V Chamber line Fail Interlock Fail Restore Fail Restore Fail Restore System/Controller OFF Restart …

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Installation Data
Oxford
Instruments
Plasma
Technology
PlasmalabSystem100
8.
Interlocks
There are
two
types
of
interlocks used
on
the
PlasmalabSystem100;
hardware
and software.
In all areas,
the
hardware
interlock
will
override
any
software
interlock. The
hardware
interlocks, and
their
effect
on
the
system components in
the
case
of
an
interlock
becoming
open
circuit
are
as
follows:
The electrical interlocks are
divided
into
two
circuits
controlling
the
power
to
the
system.
1)
The mains
power
connection
is
made
to
a system Power
Distribution
Unit. The Power
Distribution
Unit
will
disable all
of
its
power
outputs
under
the
following
conditions:
a)
If
the
Emergency
Off
button
is
pressed.
b)
Ifthere
is
an
interruption
of
the
power
input
to
the
system.
c)
If
the
Power
Distribution
Unit
external
facility
interlock
sensor
link
becomes
open
circuit.
NOTE:
The Power
Distribution
Unit
external
facility
interlock
sensor
link
enables
the
interlocks
of
external sensors, e.g. gas
detectors, exhaust scrubbers, etc.,
to
be
monitored
by
the
Power
Distribution
Unit. External
interlock
contacts connected
to
this
link
should be
voltage
free
and Normally Closed, i.e.
faulting
to
an Open Circuit.
2)
The system
internal
24V supply, comprises a process line and a chamber line:
The 24V process line,
which
controls
the
process gases and plasma
power
supply
units,
will
be
disabled
under
the
following
conditions:
a)
If
the
Vacuum Safety Switch
is
open circuit, i.e. Chamber Pressure> 600
mbar.
b)
If
the
load lock slitvalve
is
OPEN.
The 24V chamber
line
will
be disabled
under
the
following
conditions, leaving
the
system
controller
operational,
but
disabling all system components:
a)
If
the
Water
Flow
switch
is
not
closed.
b)
If
the
Chamber
top
is
OPEN.
Printed: 22·Mar·06, 6:57
Installation Data
(lCP
180)
Page 17
of
18
Issue
5:
June 05
PlasmalabSystem100
Oxford
Instruments
Plasma
Technology
Installation Data
Emergency
Off
I Electrical
24V
Process
line
24V
Chamber
line
Fail
Interlock
Fail
Restore
Fail
Restore
Fail Restore
System/Controller
OFF
Restart
Required
ON ON
RF
Generator
OFF
Powered, NOT
OFF
Powered,
OFF
Powered,
active
NOT active
NOT active
Process
Gases
OFF
Powered, NOT
OFF
Powered,
OFF
Powered,
active
NOT active
NOT active
Automatic
Pressure
CLOSED CLOSED
NO NO
CLOSED
CLOSED
Controller
Valve CHANGE CHANGE
Load lock
Slit Valve
HOLD HOLD
HOLD HOLD HOLD HOLD
Pumps
OFF
Pumps must be NO NO
OFF
Pumps must
restarted
CHANGE
CHANGE
be restarted
Table
2 • Consequences
of
open
circuit
interlocks
The
other
component
specific interlocks are
incorporated
into
the
software
controller,
alerting
the
operator
of
conditions such
as
low
process gas
flow,
pump
failure, etc. The
software
also
monitors
the
position
of
the
wafer
handling
mechanisms, ensuring safe
operation.
9. OIPT locations
worldwide
UK
Oxford Instruments Plasma Technolgy
North End, Yalton,
Bristol,
BS494AP
Tel: +44(0)1934 837000
Fax: +44(0)1934837001
Email: plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A Baker Avenue Extension
Concord, MA 01742
Tel:
+1
9783699933
Toll Free +1800-447-4717
Fax:
+1
9783698287
Email: info@ma.oxinst.com
Germany
Oxford Instruments GmbH
Olto-von-Guericke Ring 10,
0-65205 Wiesbaden
Tel: +49(0)6122 937161
Fax: +49(0)6122937175
Email: plasma@oxford.de
Issue
5:
June 05
Japan
Oxford Instruments
K.K.
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email: oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People's
Republic
of
China (Beijing)
Oxford Instruments China
Room 714, Office Tower
3,
Henderson Center,
No. 18 Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86 1065188160/1/2
Fax: +86 1065188155
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Installation Data
(ICP
180)
Page 18
of
18
People'S
Republic
of
China
(Shanghai)
Oxford Instruments China
Room 14-F,
No.1
Plaza
800 Nanjing East Road
Shanghai 200001
Tel:
+862163608530
Fax:
+862163608535
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte.
Ltd
371
Beach Road,
#02-07 Keypoint
Singapore 199597
Tel: +65 6337 6848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.sg
Taiwan
Oxford Instruments Overseas
Marketing Ltd.
1
F,
No 23 Jing-Shang 19
'h
Street,
Hsinchu, Taiwan
Tel: +65 6337 6848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.sg
Printed: 22-Mar-06. 6:57
System
Manual
Oxford
Instruments
Plasma
Technology
All
OIPT Systems
Appendix
R
Rotameter
data
1
Rotameters
2
1.1
Rotameter types 2
1.2 Setting
the
required
purge
flow
rate 3
1.3
Flow
versus scale
reading
graphs 4
Fig
1:
Typical
rotameter
2
Printed: 2-Jul-05.
11
:43
Rotameter Data
Page 1
of
4
Issue
1:
August
03