Oxford-100-Manual.pdf - 第219页

Appendix S Qualitative Specifications for all of Oxford Instruments Plasma Technology's Plasma and Ion Beam Systems Issue 16: Apri I 05 Page 1 of 22

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All
OIPT Systems
Oxford
Instruments
Plasma
Technology
System Manual
1.3
Flow
versus scale
reading
graphs
G/GAS/ROT/050 (Tube No: A
125-3)
G/GAS/ROT/25L (Tube No:
A250-4)
A125·3
A250-4
60
30
25
/
50
,/
V
40
./
20
,/
/
V
Flow
/'
Flow
/
(seem)
30
/'
(slpm)15
/
20
/
10
1:/
/
5
01
/
/
0 1 2 3 4 5 6 0 1 2 3 4 5 6
Scale
Reading
Scale
Reading
G/GAS/ROT/40L
(Tube
No:
A250-6)
G/GAS/ROT/900
(Tube
No:
A250-1)
A250-6
A250-1
50
5
40
./
4
./
/'
V
30
/
3
/
Flow
/
Flow
/
(slpm)
(slpm)
20
/
2
/
10
./
1 V
/
/
v
0/
0
0 1 2 3 4 5 6
0 1 2 3 4 5 6
Scale Reading
Scale Reading
G/GAS/ROT/aOO (Tube No:
A125-7)
A125-7
900
/
800
/
700
/
600
500
/
Flow
V
(seem)
400
/
300
200
/
V
100 /
0/
0
1 2
3
4
5 6
Scale
Reading
Issue
1:
August
03
Rotameter Data
Page 4
of
4 Printed: 2-Jul-05,
11
:43
Appendix
S
Qualitative
Specifications
for
all
of
Oxford
Instruments
Plasma
Technology's
Plasma
and
Ion
Beam
Systems
Issue 16:
Apri
I 05
Page 1
of
22
OIPT Systems
CONTENTS
Oxford
Instruments
Plasma
Technology
System
Manual
1.
Introduction
3
2.
Cooling
I
Warming
water
4
2.1 Recirculation
water
5
2.1.1
Mandatory
Specifications
for
recirculated
water
systems 6
2.2
Total
Loss
Cooling 7
2.2.1
Mandatory
Specifications
for
total
loss
cooling
systems 8
3. Electrical
supply
9
3.1 System
earthing
and
bonding
9
3.1.1
Earth connection 9
3.1.2 Neutral supply
bonding
10
3.1.3 Residual
Current
Circuit Breakers 10
3.2
Mandatory
Specifications
for
electrical installations 10
4. Compressed
air
11
4.1
Mandatory
Specifications
for
compressed
air
supplies
12
5.
Nitrogen
13
5.1
Mandatory
specifications
for
Nitrogen
supplies 13
6. Process gases
14
6.1
Mandatory
specifications
for
process gas supplies 14
6.1.1 Systems using Helium
wafer
cooling 14
6.1.2 Installation
of
low
vapour
pressure gases (e.g.
SiCI
4
•
BCI
3
•
C
4
F
s
)
15
7.
Liquid
Nitrogen
16
7.1
Mandatory
Requirements
for
Liquid
Nitrogen
systems 16
8.
Extraction
17
8.1
Mandatory
requirements
for
Rotary Pump
extraction
17
8.2
Mandatory
requirements
for
Gas
Pod extraction 17
8.3
Mandatory
requirements
for
Cryogenic
pump
extraction
18
9.
Environment
19
9.1
Mandatory
Specifications
for
the
system
environment..
19
10.
Change
Record
20
11.
OIPT
locations
worldwide
22
Fig 2.1: Recommended basic recirculation installation 6
Fig 2.2: Recommended basic
total
loss
installation
7
Fig 3.1: Recommended electrical installation 9
Fig 4.1: Recommended compressed air supply installation
11
Fig 5.1: Recommended
nitrogen
supply installation
13
Fig 6.1: Recommended process gas supply installation 14
Issue
16:
April
05
Services Specifications
Page 2
of
22
Printed: 6-Jan-06. 8:44