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OIPT Systems Oxford Instruments Plasma Technology System Manual PLASMALAB OR IONFAB SYSTEM 1 1 1 1 - - - - - - - - - - - - - - - - - - - - - __ I ,---------------------- 1 1 1 1 1 ISOLATION VALVES DEDICATED HEAT EXCHANGE…

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System
Manual
Oxford
Instruments
Plasma
Technology
OIPT Systems
2.1
Recirculation
water
WARNING
CHILLERS HAVE COMPONENTS, WHICH BECOME COLD ENOUGH
TO
CAUSE SERIOUS
INJURY. READ
THE
MANUFACTURER'S MANUALS
BEFORE
INSTALLING, OPERATING
OR
MAINTAINING
CHILLERS,
AND
ENSURE THAT ADEQUATE PROTECTIVE CLOTHING
IS
WORN.
Recirculation
water
is
used in systems
where
the
user does
not
wish
to
consume
water
at
a
high
rate,
or
where
it
is
wished
to
supply
water
to
the
system
at
a constant
temperature.
Some systems
contain
aluminium
in
direct
contact
with
coolant. These are
the
lonfab
500
Plus,
the
lonfab
300
Plus,
and
Plasma
lab
systems
fitted
with
tables
or
turbomolecular
pumps
with
plain
aluminium
cooling
channels. Certain
aluminium
chambers are also included.
However,
the
lonfab
300
Plus
does
not
contain
aluminium
in
contact
with
water,
unless
it
is
in
the
turbomolecular
pump.
In these
aluminium-containing
systems,
it
is
MANDATORY
that
the
approved
coolant
is
used
at
all times.
If
the
approved
coolant
and
installation
are
not
used,
the
system
warranty
will
not
cover any
damage
caused by
the
coolant
either
directly
or
indirectly
to
the
system
or
to
anything
else.
It
is
the
customer's responsibility
to
comply
with
the
above requirement.
If
the
customer has
any
doubt
as
to
whether
their
system falls
into
this category,
they
must
contact
OIPT
for
further
advice.
In systems
that
do
not
contain
aluminium
components, severe corrosion can still sometimes
occur:
water
will
collect corrosive chemicals, and
will
be lacking in
the
oxygen
that
protects
stainless steel.
We
strongly
recommend
that
the
approved
coolant
is
used.
If
an
alternative
product
or
water
is
used,
then
it
is
entirely
the
customer's responsibility
to
check
for
any signs
of
corrosion
or
contaminated
water.
If
the
customer's
coolant
has
not
been approved in
writing
by
OIPT,
then
the
system
warranty
will
not
cover any damaged caused by
the
coolant
either
directly
or
indirectly
to
the
system
or
to
anything
else'.
The approved
installation
and
coolant
are shown in sub-section 2.1.1 and in Fig 2.1.
Note
that
the
total
water
flow
meter
and
the
isolation valves are recommended
for
cooling
monitoring
and ease
of
maintenance.
, Customers should note.
for
example,
that
certain types
of
inhibitor
will
damage
the
pumps
of
heater/chiller units, and
that
the
use
of
municipal
(drinking
water)
or
deionized
water
can
introduce
harmful
chemicals
into
the
system.
If
plain
water
is
used, distilled
water
is
by
far
the
safest
option.
Printed: 6-Jan-06, 8:44
Services Specifications
Page 5
of
22
Issue
16:
April
05
OIPT
Systems
Oxford
Instruments
Plasma
Technology
System
Manual
PLASMALAB
OR
IONFAB
SYSTEM
1 1
1 1
- - - - - - - - - - - - - - - - - - - - -
__
I
,----------------------
1 1
1 1
1
ISOLATION
VALVES
DEDICATED
HEAT EXCHANGER
OR
CHILLER
(FITTED WITH AN
EXTERNAL BYPASS
HAVING A CAPACITY OF
100% FLOW)
TOTAL WATER FLOW
METER OF APPROPRIATE
RANGE
10-MICRON METAL MESH FILTER
MAXIMUM PRESSURE DROP AT
RATED
FLOW
RATE 0.15
BAR
(2.2 PSI)
Fig 2.1: Recommendedbasic recirculation installation
2.1.1
Mandatory
Specifications
for
recirculated
water
systems
CAUTION
If
clear
(i.e.
transparent)
tubing
is
exposed
to
sunlight,
algal
growth
can
develop,
which
can
restrict
coolant
flow.
It
is
MANDATORY
that
clear
tUbing
is
not
used
in
any
part
of
the
cooling
system.
OIPT
recommends
the
use
of
either
black
or
dark
green
tUbing.
CAUTION
It
is
the
customer's
responsibility
not
to
exceed
a
pressure
of
4.2
bar,
or
other
limit
that
has
been
set
for
the
system.
Exceeding
this
safe
pressure
may
cause
irreparable
damage
to
system
components.
The
water
must
be
kept
warm
enough
to
prevent
condensation
on
chamber surfaces and
outside
system components. This applies
to
those parts
of
the
system inside
the
clean
room
and
those parts in a service area. Condensation can
damage
components
such
as
RF
power
supplies,
ferrofluidic
seals and
automatch
units.
Any
damage
so
caused
cannot
be covered by
the
system
warranty.
Issue
16:
April
05
Services Specifications
Page 6
of
22
Printed: 6-Jan-06, 8:44
System
Manual
Oxford
Instruments
Plasma
Technology
OIPT
Systems
Pressure:
Adjustable
0.7
to
4.2
bar
(10
to
60
psi).
Chiller
I
heat
exchanger
to
be
fitted
with
a
bypass
having
a
capacity
of
100%
of
rated
flow.
Temperature
range:
See
system
installation
data
sheets.
Minimum
flows:
See
system
installation
data
sheets.
Cooling
capacity:
See
system
installation
data
sheets.
Coolant:
Hexid
A40
(OIPT
Part
No.
GIWATERISUN/007
for
15
litres)2.
This
product
is
propylene
glycol
based,
and
is
pre-diluted
ready
for
use.
See
sub-section
2.1
for
the
warranty
impact
of
not
using
this
product.
Filtration:
10
micron
metal
mesh
water
filter.
Maximum
pressure
drop
0.15
bar
(2.2
psi)
at
rated
flow.
For
example,
filter
element
Balston
SMC-100-12-10.
2.2
Total
Loss
Cooling
Municipal
(drinking)
water
may be used
in
total
loss
cooling
of
the
system
in
situations
where
clean
water
is
freely available.
but
only
if
the
water
meets
the
specification in sub-
section
2.2.1. In
case
of
any
doubt.
obtain
the
water
specification
from
the
water
utility
company. and consult
with
DIPT.
It
is
not
practical
to
use
total
loss
cooling
where
the
water
temperature
is
critical.
FILTER
0.9
MICRON FULL FLOW
TOTAL WATER FLOW
METER OF APPROPRIATE
RANGE
ISOLATION
VALVES
~
--- - ---- ---- - ---- - --
--,
I '
I
PLASMALAB
OR
10NFAB
SYSTEM
DRAIN
~
Fig 2.2: Recommendedbasic total loss installation
2
To
order
replacement
fluid,
check
the
capacity
of
the
model
of
heater/chiller
to
be
fitted
to
the
system. Also
allow
at
least 5 Iitres
for
the
system and connecting lines,
or
more
if
necessary.
Printed: 6-Jan-06, 8:44
Services Specifications
Page 7
of
22
Issue
16:
April
05