Oxford-100-Manual.pdf - 第227页

System Manual Oxford Instruments Plasma Technology OIPT Systems 3. Electrical supply Classification: For European Community customers who need this information: The systems are classified as Class A, Group 2 as defined i…

100%1 / 362
OIPT Systems
Oxford
Instruments
Plasma
Technology
System
Manual
2.2.1
Mandatory
Specifications
for
total
loss
cooling systems
CAUTION
If
clear
(i.e.
transparent)
tUbing
is
exposed
to
sunlight,
algal
growth
can
develop,
which
can
restrict
coolant
flow.
It
is
MANDATORY
that
clear
tUbing
is
not
used
in
any
part
of
the
cooling
system.
OIPT
recommends
the
use
of
either
black
or
dark
green
tubing.
CAUTION
It
is
the
customer's
responsibility
not
to
exceed
a pressure
of
5
bar,
or
other
limit
that
has
been
set
for
the
system.
Exceeding
this
safe
pressure
may
cause
irreparable
damage
to
system
components.
If
total
loss
cooling
with
municipal
water
(drinking
quality
water)
is
used in
the
system
or
in
the
pumps,
the
water
quality
must
meet
the
following
specifications.
Note
that
increased
maintenance
will
be
required
if
this
water
is
used directly
in
the
system
as
well
as
in
the
pumps.
The
water
must be
kept
warm
enough
to
prevent
condensation
on
chamber surfaces and
outside system components. This applies
to
those parts
of
the
system inside
the
clean
room
and those parts in a service area. Condensation can
damage
components such
as
RF
power
supplies,
ferrofluidic
seals and
automatch
units.
Any
damage
so
caused
cannot
be covered by
the
system
warranty.
•
Pressure:
4
to
5
bar.
Backpressure
from
the
drain
must
be
less
than
1
bar.
•
Temperature:
10°C
to
25°C
• pH:
7
to
8
•
Oxy~en:
Greater
than
4m~/litre
•
CO
2
and
NH
3
:
Less
than
10mg/litre
•
Chloride:
Less
than
100mg/litre
•
Calcium
Less
than
75mg/litre
Carbonate:
•
Filtration:
To
0.9
micron
full
flow,
for
example
filter
element
Balston
200-50-50
or
200-95-50.
Issue
16:
April
05
Services Specifications
Page 8
of
22
Printed: 6-Jan-06, 8:44
System
Manual
Oxford
Instruments
Plasma
Technology
OIPT Systems
3. Electrical
supply
Classification: For European
Community
customers
who
need this
information:
The systems
are classified
as
Class
A,
Group
2
as
defined
in
EN
55011
Clause
4.
PLASMALAB
OR
10NFAB
SYSTEM
3-Phase
supply
to
system
NEUTRAL CONDUCTOR
BONDED TO EARTH
(GROUND)
I
-------------
SAFETY
Combined
Circuit
Breaker ISOLATION
to
protect
transformer
/ BOX
to
system
phase
conductors
¥
~
r-----I
3-phase
supply
~
_ _ _ _ _ _ _ _ _ _ _ Phase 1 1 • I
or
transformer
1 • I
conductor
1 • I
secondary I : C>--j--
winding
I • I 1 1
I 1 Phase 2 I
I • 1
conductor
I 1
'---o,....,....,I:l-r----i--<;r-:-.
o-f-
Phase 3 : 1
conductor
I
~
:
Neutral I
.--:--
conductor
1 I
'--------------,-e-o--=-C>--j--
I
(jl
Hand :
Operated1
1
INDEPENDENT
EARTH (GROUND)
______
1
Fig 3.1: Recommended electrical installation
NOTES:
a)
The
combined
Circuit Breaker MUST break all phases
if
anyone
phase
exceeds
the
set
current
limit.
b) The
trip
rating
of
the
Circuit Breaker depends
on
the
system
type
and
the
supply
voltage
to
the
system.
c)
The current-carrying capacity
of
the
cables
between
the
Circuit Breakers
and
the
system must be
greater
than
the
trip
rating
of
the
Circuit Breaker.
For example,
if
a 32A Circuit Breaker
is
fitted
then
a cable having
conductors
of
a
minimum
rating
of
40A (32A x 125%)
is
required. The
conductors
will
have a
minimum
Cross
Sectional Area
(CSA)
of
6.0
mm
2
•
3.1
System
earthing
and
bonding
3.1.1
Earth
connection
To
meet
international
standards
for
RF
interference,
our
systems are
fitted
with
filtration
on
the
mains supply inputs.
As
a result,
there
is
significant
leakage
to
earth
(ground)
from
the
mains supply.
WARNING
IT IS ESSENTIAL THAT
AN
EARTH CONNECTION IS
MADE
BEFORE
CONNECTING THE
SUPPLY.
International
standard IEC950, section 5.2, requires
that
a label
is
attached
at
the
point
where
the
system
is
connected
to
the
factory
electricity supply:
either
to
the
safety isolation box,
or
to
the
transformer,
or
to
the
electrical supply
outlet
socket. This label must contain
the
following
text:
Printed: 6-Jan-06, 8:44
Services Specifications
Page 9
of
22
Issue
16:
April
05
OIPT Systems
Oxford
Instruments
Plasma
Technology
"WARNING.
High
leakage
current.
Earth
connection
essential
before
connecting
supply."
System
Manual
3.1.2
Neutral
supply
bonding
WARNING
3.1.3
THE
NEUTRAL CONDUCTOR MUST
BE
BONDED
TO
THE
EARTH (GROUND)
CONDUCTOR.
IF
THIS
IS
NOT DONE ALREADY
IN
THE
FACTORY SUPPLY, THEN IT
MUST
BE
DONE AT
THE
SAFETY ISOLATION BOX AS SHOWN
IN
Fig
3.1.
IF
AN
ISOLATING TRANSFORMER IS FITTED, THEN
THE
NEUTRAL CONDUCTOR
OF
THE
TRANSFORMER SECONDARY MUST
BE
BONDED
TO
THE
EARTH (GROUND)
CONDUCTOR.
Residual
Current
Circuit Breakers
Customers sometimes wish
to
fit
a Residual
Current
Circuit Breaker
(RCCB),
also
known
as
an
Earth Leakage Circuit Breaker
(ELCB,
or
ELB)
to
the
electrical supply
to
the
system. This
is
not
recommended
for
this
type
of
equipment.
and a 30mA breaker
is
likely
to
trip
often,
due
to
the
leakage caused by
the
filters
on
the
power
lines. This leakage
is
in accordance
with
International
standard IEC950 section 5.2.
a)
If
you
must
fit
an
ELB,
we
strongly
recommend a
minimum
current
of
100mA.
b) Even a 100mA circuit breaker
may
trip,
and
we
accept
no
responsibility
if
this turns
out
to
be
the
case.
3.2
Mandatory
Specifications
for
electrical
installations
•
Connection:
In
accordance
with
local
regulations
via
a
safety
isolation
box,
lockable
in
the
OFF
position,
mounted
adjacent
to
the
machine.
•
Configuration:
3-phase,
star
("Y")
with
a
grounded
neutral
supply
connected
to
the
centre
point.
An
independent
earth
(ground)
is
required.
•
Maximum
The
Maximum
Current
required
by
the
system
is
given
in
the
Current:
relevant
system
installation
data
sheets.
•
Voltage
&
380V
-10%
to
415V
+6%
or
208V
+/-10%
phase-to-phase.
Frequency:
Frequency
to
be
50Hz
or
60Hz.
Note
that
voltage
and
frequency
cannot
be
changed
from
the
values
specified
at
the
time
of
ordering.
•
Safety
The
system
safety
earthing
must
be
in
accordance
with
local
Earthing:
Electrical
Regulations.
See Fig
3.1.
Issue
16:
April
as
Services Specifications
Page 10
of
22
Printed: 6-Jan-06, 8:44