Oxford-100-Manual.pdf - 第229页

System Manual Oxford Instruments Plasma Technology OIPT Systems 4. Compressed air A dry and clean compressed air supply at a minimum pressure of 6 bar (90 psig) must be fed to a customer-supplied air filter/mist separato…

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OIPT Systems
Oxford
Instruments
Plasma
Technology
"WARNING.
High
leakage
current.
Earth
connection
essential
before
connecting
supply."
System
Manual
3.1.2
Neutral
supply
bonding
WARNING
3.1.3
THE
NEUTRAL CONDUCTOR MUST
BE
BONDED
TO
THE
EARTH (GROUND)
CONDUCTOR.
IF
THIS
IS
NOT DONE ALREADY
IN
THE
FACTORY SUPPLY, THEN IT
MUST
BE
DONE AT
THE
SAFETY ISOLATION BOX AS SHOWN
IN
Fig
3.1.
IF
AN
ISOLATING TRANSFORMER IS FITTED, THEN
THE
NEUTRAL CONDUCTOR
OF
THE
TRANSFORMER SECONDARY MUST
BE
BONDED
TO
THE
EARTH (GROUND)
CONDUCTOR.
Residual
Current
Circuit Breakers
Customers sometimes wish
to
fit
a Residual
Current
Circuit Breaker
(RCCB),
also
known
as
an
Earth Leakage Circuit Breaker
(ELCB,
or
ELB)
to
the
electrical supply
to
the
system. This
is
not
recommended
for
this
type
of
equipment.
and a 30mA breaker
is
likely
to
trip
often,
due
to
the
leakage caused by
the
filters
on
the
power
lines. This leakage
is
in accordance
with
International
standard IEC950 section 5.2.
a)
If
you
must
fit
an
ELB,
we
strongly
recommend a
minimum
current
of
100mA.
b) Even a 100mA circuit breaker
may
trip,
and
we
accept
no
responsibility
if
this turns
out
to
be
the
case.
3.2
Mandatory
Specifications
for
electrical
installations
•
Connection:
In
accordance
with
local
regulations
via
a
safety
isolation
box,
lockable
in
the
OFF
position,
mounted
adjacent
to
the
machine.
•
Configuration:
3-phase,
star
("Y")
with
a
grounded
neutral
supply
connected
to
the
centre
point.
An
independent
earth
(ground)
is
required.
•
Maximum
The
Maximum
Current
required
by
the
system
is
given
in
the
Current:
relevant
system
installation
data
sheets.
•
Voltage
&
380V
-10%
to
415V
+6%
or
208V
+/-10%
phase-to-phase.
Frequency:
Frequency
to
be
50Hz
or
60Hz.
Note
that
voltage
and
frequency
cannot
be
changed
from
the
values
specified
at
the
time
of
ordering.
•
Safety
The
system
safety
earthing
must
be
in
accordance
with
local
Earthing:
Electrical
Regulations.
See Fig
3.1.
Issue
16:
April
as
Services Specifications
Page 10
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Printed: 6-Jan-06, 8:44
System
Manual
Oxford
Instruments
Plasma
Technology
OIPT Systems
4. Compressed
air
A
dry
and clean compressed
air
supply
at
a
minimum
pressure
of
6 bar (90 psig) must be fed
to
a customer-supplied air
filter/mist
separator/pressure
regulator
unit
mounted
adjacent
to
the
machine. A suitable
unit
is
supplied by
SMC
(part
No.
AC
2030);
other
units
to
the
same
specification can be used.
Maximum
safe
pressure in
the
customer's feed
to
the
regulator
is
determined
by
the
regulator
used (9.9 bar (148.5 psig)
for
the
SMC
unit).
The supply
to
the
system must be
monitored
by a pressure gauge having a range
of
0
to
10
bar
(0
to
150 psi). The pressure
regulator
must be
fitted
with
a stop
to
prevent a pressure
greater
than
6 bar
from
being supplied
to
the
system. The pressure
to
be used
will
be set
during
commissioning
of
the
system.
The
following
air
filter/mist
separator/pressure
regulator
unit
components are recommended:
Air
filter:
SMC
AF2000-02D
with
filter
element
1129116A.
Mist
separator:
SMC
AFD2000-02D
with
filter
element
63092. This
filter
element
must
be
changed
annually.
Note
that
as
this
item
is
not
supplied by
DIPT,
its maintenance
is
not
included in
the
system
manuals.
Regulator
with
gauge:
SMC
AR2001-02G.
Spacers: 2
off
SMC
Y20L.
DRY AND CLEAN
.----,------,.-------,
AIR
SUPPLY
COMPRESSED
AIR
SUPPLY TO
PLASMALAB
OR
IONFAB SYSTEM
(SEE SPECIFICATION)
)
6MM
I
PUSH-FIT
CONNECTOR
PRESSURE
GAUGE
oTO 10
BAR
(0 TO 150 PSIG)
)
ADJUSTABLE
PRESSURE
~--------~
REGULATOR
MIST
SEPARATOR
SMC COMPONENTS
OR EQUIVALENT
FILTER
)
MINIMUM PRESSURE
6
BAR
(90 PSIG)
Fig 4.1: Recommended compressed air supply installation
Printed: 6-Jan-06, 8:44
Services Specifications
Page
11
of
22
Issue
16: April
05
OIPT
Systems
Oxford
Instruments
Plasma
Technology
System Manual
4.1
Mandatory
Specifications
for
compressed
air
supplies
•
Inlet
pressure
to
filter/mist
6
bar
(90
psig)
minimum.
separator/re~ulator
unit:
OUTLET
TO
SYSTEM:
•
Oil
content:
Less
than
10
ppm
•
Maximum
Moisture
Content:
·3°C (25°F)
•
Filtration:
Maximum
particle
size
of
0.3
microns
•
Regulator
outlet
pressure:
Adjustable
from
3
bar
to
6
bar
(45
psig
to
90
psig).
6
bar
must
be
the
maximum
provided.
•
Maximum
flow
rate:
135
litres/minute
(5
scfm).
•
Pressure
monitoring:
o
to
10
bar
(0
to
150
psi)
pressure
gauge.
Issue
16:
April
05
Services Specifications
Page 12
of
22 Printed: 6-Jan-06. 8:44