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System Manual Oxford Instruments Plasma Technology OIPT Systems 9. Environment 9.1 Mandatory Specifications for the system environment Rated for use in a Pollution Degree 1 Installation Category environment (laboratory o…

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OIPT
Systems
Oxford
Instruments
Plasma
Technology
System Manual
8.3
Mandatory
requirements
for
Cryogenic
pump
extraction
WARNING
ANY
CRYOGENIC PUMP, WHICH PUMPS HAZARDOUS GASES MUST HAVE, A VENT
PIPE FITTED TO ITS RELIEF
VALVE
TO PREVENT
THE
RELEASE
OF
GAS INTO
THE
CLEAN
ROOM.
THE
PUMPS COLLECT
THE
PROCESS GASES
AND
THE GASEOUS RESIDUES DURING
OPERATION. THESE GASES ARE RELEASED THROUGH THE RELIEF
VALVE
DURING
PUMP REGENERATION OR
IF
ELECTRICAL POWER IS LOST.
If
a
cryogenic
pump
is
used
to
pump
toxic,
corrosive,
or
flammable
gases,
a
written
action
plan
is
required.
This
must
be
prepared
in
consultation
with
OIPT
and
other
competent
bodies.
Specialised
equipment
such
as
scrubbers
and
furnaces
may
be
needed
to
dispose
of
hazardous
gases.
If
the
pumped
gases
contain
more
than
20%
oxygen,
a
vent
pipe
must
be
fitted
to
the
system's
cryo
pump
outlet
connector.
The
vent
pipe
must
be
routed
to
a
safe
place
outside
of
the
clean
room
and
conform
to
local
safety
standards.
If
a
cryogenic
pump
is
used
to
pump
gases
containing
more
than
20%
oxygen,
the
associated
roughing
pump(s)
must
be
lubricated
with
a
PFPE
fluid,
e.g.
Fomblin
or
Krytox.
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05
Services Specifications
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System
Manual
Oxford
Instruments
Plasma
Technology
OIPT Systems
9.
Environment
9.1
Mandatory
Specifications
for
the
system
environment
Rated
for
use
in
a
Pollution
Degree
1
Installation
Category
environment
(laboratory
or
clean
industrial
environment).
•
Operating
temperature:
SoC
to
2SoC.
•
Storage
temperature:
O°C
to
SO°C.
•
Maximum
humidity:
90%
See NOTE
1.
•
Minimum
humidity:
10%
See
NOTE
2.
•
Electrostatic
build·up:
Low
static
environment.
See NOTE 2.
•
Ambient
light
level:
300
lux
minimum.
NOTE 1:
High
humidity
will
have a progressively
significant
effect
on system
performance.
At
humidity
greater
than
50%,
the
rate
of
chamber
pump-down
after
venting
the
chamber
will
be
affected
significantly, and
at
humidity
greater
than
65%,
the
rate
of
chamber
pump-down
may
not
meet
system specifications.
NOTE 2:
Low
humidity
will
introduce
a risk
of
electrostatic build-up,
with
subsequent
discharge
to
the
system
producing
a
malfunction
or
damage. The systems are
tested
to
EN60801-2, severity level
3.
We
recommend
the
use
of
an
environment,
which
protects against electrostatic
build-up,
and extra
precautions
will
be necessary
at
low
humidity.
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Services Specifications
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19
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Issue
16:
April
05
OIPT Systems
Oxford
Instruments
Plasma
Technology
System Manual
10.
Change
Record
Issue
No.
Details
of
chanQe
Date
16
Chanqe record
table
added
20
April
05
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05
Services Specifications
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22
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