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OIPT Systems Oxford Instruments Plasma Technology System Manual 10. Change Record Issue No. Details of chanQe Date 16 Chanqe record table added 20 April 05 Issue 16: April 05 Services Specifications Page 20 of 22 Printed…

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System
Manual
Oxford
Instruments
Plasma
Technology
OIPT Systems
9.
Environment
9.1
Mandatory
Specifications
for
the
system
environment
Rated
for
use
in
a
Pollution
Degree
1
Installation
Category
environment
(laboratory
or
clean
industrial
environment).
•
Operating
temperature:
SoC
to
2SoC.
•
Storage
temperature:
O°C
to
SO°C.
•
Maximum
humidity:
90%
See NOTE
1.
•
Minimum
humidity:
10%
See
NOTE
2.
•
Electrostatic
build·up:
Low
static
environment.
See NOTE 2.
•
Ambient
light
level:
300
lux
minimum.
NOTE 1:
High
humidity
will
have a progressively
significant
effect
on system
performance.
At
humidity
greater
than
50%,
the
rate
of
chamber
pump-down
after
venting
the
chamber
will
be
affected
significantly, and
at
humidity
greater
than
65%,
the
rate
of
chamber
pump-down
may
not
meet
system specifications.
NOTE 2:
Low
humidity
will
introduce
a risk
of
electrostatic build-up,
with
subsequent
discharge
to
the
system
producing
a
malfunction
or
damage. The systems are
tested
to
EN60801-2, severity level
3.
We
recommend
the
use
of
an
environment,
which
protects against electrostatic
build-up,
and extra
precautions
will
be necessary
at
low
humidity.
Printed: 6-Jan-06. 8:44
Services Specifications
Page
19
of
22
Issue
16:
April
05
OIPT Systems
Oxford
Instruments
Plasma
Technology
System Manual
10.
Change
Record
Issue
No.
Details
of
chanQe
Date
16
Chanqe record
table
added
20
April
05
Issue
16:
April
05
Services Specifications
Page 20
of
22
Printed: 6-Jan-06. 8:44
System Manual
NOTES:
Printed: 6-Jan-06. 8:44
Oxford
Instruments
Plasma
Technology
Services Specifications
Page
21
of
22
OIPT Systems
Issue
16:
April
05