Oxford-100-Manual.pdf - 第241页

Plasmalab ICP 180 Inductively Coupled Plasma Source TCP 180 source fitted to a Plasmalab System 100 Issue 4: January 06 Page 1 of 26

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OIPT Systems
Oxford
Instruments
Plasma
Technology
System Manual
11.
OIPT locations
worldwide
UK
Oxford Instruments Plasma Technolgy
North End, Yalton,
Bristol,
BS494AP
Tel: +44(0)1934837000
Fax: +44(0)1934837001
Email: plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A Baker Avenue Extension
Concord, MA 01742
Tel:
+1
9783699933
Toll Free +1800-447-4717
Fax:
+1
978 369 8287
Email: info@ma.oxinst.com
Germany
Oxford Instruments GmbH
Olto-von-Guericke Ring 10,
0-65205 Wiesbaden
Tel: +49(0)6122937161
Fax: +49(0)6122 937175
Email: plasma@oxford.de
Issue
16:
April
05
Japan
Oxford Instruments K.K.
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email: oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People's Republic
of
China (Beijing)
Oxford Instruments China
Room 714, Office Tower
3,
Henderson Center,
No. 18 Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86
1065188160/1/2
Fax: +86 106518 8155
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Services Specifications
Page
22
of
22
People's Republic
of
China
(Shanghai)
Oxford Instruments China
Room 14-F,
NO.1
Plaza
800 Nanjing East Road
Shanghai 200001
Tel: +86 216360 8530
Fax: +86 216360 8535
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte. Ltd
371
Beach Road,
#02-07 Keypoint
Singapore 199597
Tel:
+6563376848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.sg
Taiwan
Oxford Instruments Overseas
Marketing Ltd.
1F, No
23
Jing-Shang 19
'h
Street,
Hsinchu, Taiwan
Tel: +65 6337 6848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.s9
Printed: 6-Jan-06, 8:44
Plasmalab
ICP
180
Inductively Coupled Plasma Source
TCP
180 sourcefitted to a Plasmalab System 100
Issue
4:
January 06 Page 1
of
26
Plasma
lab
Ie
P
180
Contents
Oxford
Instruments
Plasma
Technology
Equipment
Manual
1.
Health
and
Safety
3
2.
Services
4
2.1
Qualitative
requirements 4
2.2
Quantitative
requirements 4
2.2.1
Cooling water. 4
2.2.2
Process
gas 4
2.2.3
RF
power
4
2.2.4 Electrical supply 4
2.2.5 Extraction 4
3.
Description
5
3.1 Function 5
3.2
Mechanical assembly 7
3.3
Source specification 8
3.4
Graphs
of
typical
operating
characteristics 9
4.
Installation
11
5.
Operating
Instructions
12
5.1
Introduction
12
5.1.1
Manual
adjustment
of
the
Automatch
Unit
12
5.1.2
Obtaining
a Plasma
13
6.
Maintenance
15
6.1
Maintenance
schedule
15
6.2
Safety maintenance
15
6.2.1 Inspection and renewal 16
6.3
Routine maintenance
17
6.3.1
As
required
17
6.3.2
Weekly
18
6.3.3
3-Monthly
18
6.4
Changing
the
ICP180 dielectric
tube
19
7.
Troubleshooting
21
7.1 Customer
Support
Facilities
21
7.2
High reflected
power
initial
checks
22
7.3
High reflected
power
(system
under
vacuum)
23
7.3.1
Automatch
gives reflected
power>
5%
23
7.3.2
Automatch
gives reflected
power
of
2%
to
5%
24
OIPT
locations
worldwide
26
Fig
1:
ICP
180 source -
cross
section
of
principal components 5
Fig
2:
ICP
180 Exploded
view
7
Fig
3:
Ion
current
density
at
the
wafer
versus
ICP
power
9
Fig
4:
Operating
window
10
Fig
5:
Typical
AMU
control
panel 12
Fig
6:
Automatch
components
25
Issue
4:
January 06
ICP
180 Source
Page 2
of
26
Printed: 18-Jan-06. 8:44