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Plasmalab Ie P 180 Oxford Instruments Plasma Technology WARNING Equipment Manual BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1· HEALTH AND SAFETY. 6.2.1 Inspection and renewal WARNING DISCARDED COMPONENTS M…

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Equipment
Manual
Oxford
Instruments Plasma Technology
WARNING
Plasma
lab
ICP
180
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
6.
Maintenance
6.1
Maintenance
schedule
The maintenance
required
to
ensure
continued
safety and
reliability
is
listed in
the
following
Maintenance
Schedule.
The
periodicity
is
indicated by an asterisk (
*)
in
the
appropriate
column.
As
Three-
Task Required
Weekly
Monthly
Notes
Measure
RF
emissions
*
See
Appendix
A
of
the
System 100
manual
for
details.
RF
should also be
measured
after
any
maintenance
involving
the
removal
of
covers
and
monitored
continuously
if
the
system
is
operated
with
RF
power
applied
and
any
covers
removed.
Inspect
Quartz
*
See
sub-section 6.2.1. Periodicity may
components
need
to
be reduced
depending
on
process conditions.
Inspect
Alumina
*
See
sub-section 6.2.1. Periodicity may
components need
to
be reduced
depending
on
process conditions.
ICP
dielectric
tube
*
See
sub-section 6.3.1. Periodicity depends
cleaninq
on
process
condition.
Vacuum check
*
See
sub-section 6.3.2.
Water
cooling circuit
*
See
sub-section 6.3.3.
RF
enclosure exhaust
*
See
sub-section 6.3.3.
flow
6.2
Safety
maintenance
Downstream microwave,
ECR
and
induction
coupled plasma sources contain
quartz
or
alumina
tubes
or
windows
under
vacuum,
which
may be subject
to
attack
by
the
plasma process.
If
these components fail
whilst
under
vacuum, an implosion can occur. This should
not
present a safety hazard, provided
the
equipment
is
used
with
all covers and screens in place,
but
may cause damage
to
system components.
Failure
by
implosion becomes
more
likely
as
the
components age,
therefore
they
should be regarded
as
consumable items. A
programme
of
regular
inspection and renewal
of
these components
is
necessary
to
minimise
the
risk
of
implosion.
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Issue
4:
January 06
Plasmalab IeP180
Oxford
Instruments
Plasma Technology
WARNING
Equipment
Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION
1·
HEALTH
AND
SAFETY.
6.2.1
Inspection
and
renewal
WARNING
DISCARDED COMPONENTS
MAY
BE
CONTAMINATED WITH RESIDUES FROM
THE
PLASMA
PROCESS
AND
MAY
BE
ACIDIC
OR
TOXIC. DISPOSE WITH REGARD
TO
LOCAL PRACTICES.
IMPORTANT:
The
following
inspection
intervals
should
be
reduced
if
the
source is
operated
for
prolonged
periods
at
high
powers,
especially
for
quartz
components
operating
in
fluorine-containing
plasmas.
Quartz
components
The
internal
surfaces
of
these components should be inspected
at
intervals
of
three
months
or
less.
Components
showing
significant
signs
of
wear
should be discarded and replaced by a
new
component.
See
'Tube
wall
thickness'
below.
Alumina
components
The
internal
surfaces
of
these components should be inspected
at
intervals
of
six
months
or
less.
Components
showing
significant
signs
of
wear
should be discarded and replaced
by
a
new
component.
See
'Tube
wall
thickness' below.
Tube
wall
thickness
The
nominal
minimum
wall
thickness
of
a
new
tube
is
6 mm.
During
an inspection,
if
the
wall
thickness
is
reduced
to
4
mm
or
less
at
any
point
then
the
tube
must be replaced by a
new
component. To change
the
tube,
refer
to
sub-section 6.4. page 19.
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January 06
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Printed: 18-Jan-06, 8:44
Equipment
Manual
Oxford
Instruments
Plasma
Technology
WARNING
Plasma
lab
Ie
P180
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
6.3
Routine
maintenance
&.
WARNING
PINCH POINT - WHEN
THE
CHAMBER LID IS OPENED
OR
CLOSED, LIMBS,
FINGERS
ETC
CAN BECOME TRAPPED BETWEEN
THE
LID
AND
THE
PROCESS
1-------------1
CHAMBER BASE RESULTING
IN
SEVERE INJURY.
Ensure
that
all
personnel
are
kept
clear
of
the
chamber
lid
when
it
is
opened
or
closed.
When
opening
or
closing
the
chamber
lid,
ensure
that
both
of
your
hands
are
kept
clear
of
the
pinch
point.
When
the
process
chamber
lid
is
to
be
kept
in
its
raised
position
for
prolonged
periods,
ensure
that
it
is
held
safely
in
its
open
position
without
relying
entirely
on
the
gas
support
struts.
6.3.1
As
required
ICP
dielectric
tube
cleaning
WARNING
IF
VENTING
AND
OPENING
THE
ICP180 FULLY AFTER USING HALOGENATED GASES
(CONTAINING
CL-
F-
Br-
OR
1-),
THE
RESIDUAL GAS
IN
THE
CHAMBER
IS
LIKELY
TO
EXCEED LONG TERM EXPOSURE LIMITS FOR
THE
EQUIVALENT ANHYDROUS ACID
(HCI, HF, HBr, HI) IN GASEOUS FORM. RUNNING
THE
DEFAULT CLEANING
RECIPE
AND
PUMPING FOR
30
MINUTES MORE WILL REDUCE THE RESIDUAL GAS
CONSIDERABLY
BUT
USERS
SHOULD
MAKE
THEIR
OWN
SAFETY ASSESSMENTS ON
THE
NEED
FOR
PERSONAL PROTECTIVE EQUIPMENT
IN
SUCH SITUATIONS.
Processes
capable
of
generating
hydrocarbon
or
fluorocarbon
monomers can
coat
the
inside
of
the
ICP
dielectric
tube
with
polymer.
An
optimised
cleaning process
would
need
to
be developed
for
each
application,
but
as
a
default
process use:
Gas:
Pressure:
RF
power:
Time:
Oxygen (50-100
seem).
2Pa
(15
mTorr).
1000W.
1 hour.
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